Compact and Lightweight

40 40 40 80 80 Suction flow rate ZB Suction flow rate 20 20 20 20 40 40 ZA 0 0 0 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] 0 0 20 40 60 80 Supply pressure [MPa] 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.5 MPa Load rate: 50% Stroke 60 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ7143-02 Cylinder is in extending.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

VFS

1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

CA2

E1 L1 MM NDH10 A A1 R1 U1 NX d H B C D 40 50, 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 I-04A I-05A I-08A I-10A NT-04 NT-05 NT-08 NT-10 40 50, 63 80 100 22 27 37 37 24 28 36 40 55 60 71 83 M14 x 1.5 15.5 15.5 22.5 24.5 20 20 26 28 69 74 91 105 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 8 11 13 16 22 27 32 41 25.4 31.2 37.0 47.3 21 26 31 39 12 12 18 20 16 16

Speed Controller with One-touch Fitting

(40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35) AS421F-04-10(S)A 10 1/2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

REC

8 10 32 32 52 192 202 150 to 700 20 1 8 34.5 M26 X 1.5 25 146 9 10 40 40 60 196 206 150 to 700 20 1 8 42.5 M26 X 1.5 32 159 9 10 40 40 60 209 219 150 to 1000 22 1 4 51 M32 X 2 40 181 10 11 53 53 77 236.5 247 200 to 1000 26.5 4.9-13 Series REC Construction !

KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPGR04-06 KPQR04-06 3 39.4 20.1 6 4 M A L 10.4 18 4 4 KPGR04-08 KPQR04-08 41.9 20.2 4 8 KPQR06-08 KPGR06-08 20.8 4 42.5 6 12.8 19.5 10 10 KPQR06-10 KPGR06-10 5 21.2 45 Applicable fitting size d 10 KPGR08-10 KPQR08-10 5 47 23.2 8 15.2

VFR

Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

CL

Auto switch model Bore size 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NT, F5BA, F59F Foot CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 BT-04 BT-04 BT-06 BT-08 BT-08 Flange Single clevis CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 D-A3/A44/G39/K39 BD1-05M BD1-06M BD1-08M BD1-10M BD1-04M CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 D-B5/B6/B59W D-G5/K59/G5W/K59W D-G5BA

CV/MVGQ

TX TY TZ QY S TD TT Bore size (mm) 20 25 32 40 52 36 116 62 8 10 32 32 14 120 10 40 40 60 40 14 62 9 40 60 40 122 9 10 40 16 64 44.5 154 53 53 77 16 88 10 11 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

CV/MVGQ

TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 154 44.5 77 53 53 11 10 88 16 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

AS-FG/ASD-FG

AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03 AS431FG-N04

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

39.6 18.5 18.3 21.9 35.2 30.6 8 15.2 5/32" 10.4 12.9 36 16 32 16.2 10.9 AS231FG-02-10 AS231FG-N02-05 31 47.9 42.1 21 20.2 23.9 38.7 31.1 10 18.5 3/16" 11.4 40 17 33 NPT 1/4 AS331FG-02-06 AS231FG-N02-07 39.9 34.9 29.4 34.4 25.2 46.5 45.1 17 25.6 38.5 34.2 6 12.8 1/4" 13.2 60 18.5 19 36 17.5 20.6 18.3 12.9 AS331FG-02-08 AS231FG-N02-09 28.2 49.5 47.9 18.5 28.2 39.7 35.2 8 15.2 5/16" 15.2 63

Mechanical Valves Series NVM, NVFM, NVZNI

4 8 7 (123 7) 1 5 7 (40) 1 3 0 (33) 0.87 t22\ o.2a (71 o.7E fi9) o.12 (3) 0.4I ( 1 1 ) Millimeters in Parentheses NvFl,l25GN02-08 NVFil250-N020 F O F 4.63 lbs. (2 1 Ksl P T 0.17 in (4.4 mm) or. 0.08 in (2.0 mm) T.T O 25 in 18.4 mm\ '7s PSIG (s Ksqqlq1 tu.F. 3.31 lbs (1.5 Ks) T f 40" '75 PSIG (5 Kgf/cm2) ' May be rotated without changing porl localion A B c D E F u H K M N A B D E F G H '

IIIIIII

4 8 7 (123 7) 1 5 7 (40) 1 3 0 (33) 0.87 t22\ o.2a (71 o.7E fi9) o.12 (3) 0.4I ( 1 1 ) Millimeters in Parentheses NvFl,l25GN02-08 NVFil250-N020 F O F 4.63 lbs. (2 1 Ksl P T 0.17 in (4.4 mm) or. 0.08 in (2.0 mm) T.T O 25 in 18.4 mm\ '7s PSIG (s Ksqqlq1 tu.F. 3.31 lbs (1.5 Ks) T f 40" '75 PSIG (5 Kgf/cm2) ' May be rotated without changing porl localion A B c D E F u H K M N A B D E F G H '