Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

CQS

17 19.5 22.5 CL 34.5 35.5 42 47.5 A 45.5 46.5 61 67.5 B 22 22 29.5 32.5 CL 39.5 40.5 52 57.5 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 12 16 20 25 5, 10 B + Stroke CL + Stroke A + Stroke Double clevis bracket material: Carbon steel For details about the rod end nut and accessory brackets, refer to page 7-6-20.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) (Up to 18 solenoids possible) (Up to 18 solenoids possible) 18 18 18 stations 18 stations Note 2) Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations.

Thermo-chiller

/56 L/min) Maximum ow rate 50/60 Hz 14.5 to 17.9 gal/min (55/68 L/min) Maximum pump head 164 ft (50 m) Minimum operating ow rate 50/60 Hz Note 7) 7.4/11.0 gal/min (28/42 L/min) Tank capacity 4.75 gal (18 L) Circulating uid outlet, circulating uid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic uid ll system (Standard)

MQQ

Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40 20.5 166 8 97.5 55 20 25 6.8 28 142.5 3.2 40 47 24.5 175 8 102.5 55 20 CEP1 CE1 Rod side flange style: MQMLF 6 CE2 20 ML2B 2.3 C J G5-S 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke CV MVGQ 10, 16, 20, 25 CC RB FY J FT

MQQ

Dimensions Foot style: MQMLL 6 25 14 33 42 18.5 2.3 6 9 2-5.5 66 + Stroke 75 + Stroke 93.5 + Stroke RE A B REC 10, 16, 20, 25 CX CY LY LH MQQ M X X Y Y LX LZ Z 4-LC S + Stroke LS + Stroke ZZ + Stroke LT RHC MK(2) RS Q G RS H A Bore size (mm) LC LH LS LT LX LY Z ZZ X S LZ Y RZQ 10 5.5 14 83 2.3 33 25 19 108 6 65 42 9 16 5.5 18 92 2.3 42 30 21 119 6 74 54 9 MI W S 20 6.8 25 137.5 3.2 40 40

Vacuum Unit

Number of Manifold Stations that can be Operated Simultaneously in page 18.

ZR

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Manifold Type: 42 (Base Mounted), Valve Stations: 19 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 2 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF), CE Marked: Q (CE Marked)

Manifold Type: 42 (Base Mounted), Valve Stations: 8 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 9 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 10 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 11 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 12 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 14 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 15 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 16 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 42 (Base Mounted), Valve Stations: 8 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF), CE Marked: Q (CE Marked)

Manifold Type: 42 (Base Mounted), Valve Stations: 13 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)