AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

194.5 121.3 73.2 53 59.5 59.5 27.5 27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5

VK3000

x 26 Round head combination screw M3 x 26 Round head combination screw M3 x 8 Round head combination screw Blanking plate Manifold gasket Manifold gasket Applicable base VK3000-9-1 Sub-plate VV5K3-40(-Q) VV5K3-(S)41(-Q) Manifold base VV5K3-(S)42(-Q) Applicable base VV5K3-20(-Q) VV5K3-21(-Q) Manifold base Manifold gasket for blanking plate Applicable base: In common for all types of VV5K3

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

IDG

inch IDG10, 20 IDG10H, 20H With fitting for purge air discharge (Option: P) (H) Purge air E A Port size L C 41 2.3 Purge air discharge tubing port for dehumidification 14 7 Applicable tubing O.D.: 8 5/16 inch 14 16 23 IN OUT Bracket (Accessory: B) (G) B D Purge air discharge tubing port for dehumidification Applicable tubing O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge

VQ5000

78.5) 122 106 59.5 4 (A) port 13.52 (B) port 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5

4/5 Port Air Operated Valve SYJA3000 Series

x 0.5 0.39 0.10 0.59 [0.40] 0.43 [0.33] 0.16 [0.11] 0.36 54 (28) 3 position 0.42 [0.33] 0.16 [0.080] 0.46 0.32 0.11 0.58 [0.32] 22 25 2 position SYJA320-M3 M3 x 0.5 M3 x 0.5 0.9 28 3 position 22 25 2 position SYJA330 M3 x 0.5 Note 1) Value when used on a manifold.

5 Port Solenoid Valve SY Series

For type W, DC voltage is only 5 16" One-touch fitting for N9 5 5 16" One-touch fitting for N9 One-touch fitting for One-touch fitting for One-touch fitting for available.

VK3000

x 26 Round head combination screw DXT199-23-4 M3 x 26 Round head combination screw M3 x 8 Round head combination screw VK300-33-3 Blanking plate VK3000-7-1 Manifold gasket VK3000-6-1 Manifold gasket VK3000-6-2 Manifold gasket for blanking plate VK3000-6-3 Applicable base Type VV5K3-20 Type VV5K3-21 Manifold base Applicable base VK3000-9-1 Sub-plate Type VV5K3-40 Type VV5K3-(S)41 Type VV5K3

Modular F.R.L. Unit

28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 105 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 105 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For

PSxx-OMR0001CN

No.PS-OMR0001CN-J // ISA3 1 2 7 8 14 15 2 (ISA3) 15 () 16 (2 ) 16 17 20 26 26 29 34 38 3 41 42 44 44 44 45 45 4 46 46 46 () 58 59 60 5 61 62 62 -1No.PS-OMR0001CN-J 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety

SZ3000

CompoBus/D compatible OMRON Corporation: CompoBus/S (16 points) compatible OMRON Corporation: CompoBus/S (8 points) compatible Mitsubishi Electric Corporation: CC-Link compatible Without SI unit Maximum of 16 stations, but up to 16 solenoids are possible. Double wiring specifications ... ... 8 stations 9 stations 08 09 Up to 16 solenoids are possible.

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

Table of Contents

-15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 7-2-6 6 Mini-free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil 2 pcs. 1 pc.

Rotary Table Series MSU

x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

ZSE F/ISE

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

Compact Cylinder with Air Cushion and Lock Series RLQ

95 113 4-11 9 16.2 9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25 Cap bolt Double clevis/RLQD63 8 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3

3 Port Air Operated Valve

32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3/8, 1/2 1(P) port 1568 3 Port/Air Operated Valve Manifold Common Exhaust Type 41 / Individual Exhaust Type 42 VPA300/500/700 Series SYA How to Order Manifold SYJA VZA VV3PA 3 1 41 04 02 Type 41/Common exhaust VFA VFRA Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable