Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position

Slider Type Ball Screw Drive/11-LEFS Series

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

VQ5000

4 (A) port 13.52 (B) port 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port

Compact Cylinder with Lock Series CLQ

50 47.5 43.5 48 44.5 41 42 40 6 51.5 13 44.5 8.5 47.5 9 47 63 50 54.5 51 54 48.5 47.5 50 50.5 16 43.5 9 46.5 12 46 11.5 80 60 61 64 58.5 64.5 57.5 63 56 19 12 52 15 49 14.5 51.5 100 71 74 70 74.5 67.5 68.5 80 22.5 15.5 65 18.5 58 18 61 60.5 100 28.5 75.5 24.5 68.5 21.5 71.5 71 24 21 Series CLQ Auto Switch Connections and Examples Basic Wiring Lead wire colors inside [ ] are those prior

Electric Actuator/Slider Type

Note 12) For an actuator with lock, add the power consumption for the lock.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

ZQ-OM01401

1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A

3 Port Air Operated Valve

N.O. 40 12 NC 51.5 115.1 107.1 107.1 115.1 86 24 1P 51.5 NO 12 1/2 1(P) port 1/8 12(PA) port (Pitch) P = 41 8 37 M5 x 0.8 (Breathing hole) L1 L2 (Station n) (Station 1) 1/8 12(PA) port 12 127 94.5 78.2 2A 2A 63 19 1/2 2(A) port (Pitch) P = 41 37 2 stations 115 99 156 140 197 181 238 222 279 263 320 304 361 345 402 386 443 427 484 468 525 509 566 550 607 591 648 632 689 673 730 714 771 755

5 Port Solenoid Valve SY Series

SY7000 3 8" N11 N9 N11 5 16" SY9000 3 8" Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC M plug connector DIN terminal Manual override Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type G:Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm

SZ3000

For DIN rail weight, refer to page 1-3-12.

Modular F.R.L. Unit

33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 105 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 105 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

Table of Contents

-15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 7-2-6 6 Mini-free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil 2 pcs. 1 pc.

Compact Cylinder with Air Cushion and Lock Series RLQ

9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25 Cap bolt Double clevis/RLQD63 8 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 12

MIW/MIS

of auto switches 12mm 20mm 12 2 pcs. 1 pc.

VK300

x 26 Round head combination screw M3 x 26 Round head combination screw Manifold gasket Manifold gasket Applicable base Applicable base VK300-45-1 Sub-plate VV3K3-40 (-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41

VK300

42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.