SMC Corporation of America
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:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

(Phoonix) 2001 W Melin(h Lane Ph@nix, Az 85027 Tel: (602) 492-0908 FAX: (602) 492-9493 SitC PnouDatlca Inc' (Houston) 9OO1 Jameel, Suite 180 Houston, TX Z04O Tel: (713) 460-O762 FAXr (713) 460-1510 Sf,lC Pneumttict Inc. (Charlotte) 5029-8 West W T Haris Blvd. Charlotte, NC 28269 Tel: (704) 597-9292 FAX: (704) 596-9561 SllC Pneumtlics tnc.

Technical Data 47 6 1193 MY1B Series Stroke Adjustment Units With adjustment bolt MY1B AZ Stroke Bore size E EA EB W TT h Stroke adjustment unit FC EC EY (mm) FC Applicable cylinder E EA EB EC EY h TT MY1B25 MY1B32 MY1B40 W 60 5 (Max. 16.5) 3.5 13 53.5 6.5 49 10 20 8 (Max. 20) 4.5 17 67 8.5 61 12 25 74 9 (Max. 25) 4.5 17 81.5 9.5 76 15 31 94 With high load shock absorber + adjustment bolt

C9 Technical Data C11.2 1215 MY1H Series Stroke Adjustment Unit With adjustment bolt MY1H AZ Stroke Bore size E EA EB W h TT Stroke adjustment unit FC FA EC EY Applicable cylinder E EA EB EC EY h TT FC W FA MY1H25 18 9 40 7.5 53.5 16 21 3.5 53 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 64 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 9 (Max.25) 75 With low load shock absorber + adjustment

125 (0.9) Compression Rc, R, NPT P.1 Female thread type Compression Manually Operated Type Fitting Knob Body material Max. operating pressure psig (MPa) Cv Note) Connections Page Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ

AZ-T-VCW Page 4.5-3 Valve model How to Order Valves Page 4.5-8 Valve model Note) Indicate the valve model, as a name plate is attached to the clip. When the loosened clip is pulled out in direction using pinchers, etc., the coil can be removed and replaced in direction . After replacing the coil, the clip is reinstalled by pushing it back in the direction opposite to its removal. 4.5-14

Air operated type Diaphragm Valve for Ultra High Purity Series AZ3542 & 4542 Suitable for UHP gas supply line Body material: 316L SS Pneumatically actuated normally closed RoHS How to Order (Inlet) (Outlet) 3 AZ 542 2P MV4 MV4 S Size Seat material Code Cv 0.29 0.5 Code Material PCTFE (Standard) Polyimide 3 4 No code VS Model Connections Status Normally closed (N.C.)

Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity with internal changes only, no change in external dimensions.

Melinda Lane Phoenix, AZ 85027 Tel: (623) 492-0908 FAX: (623) 492-9493 SMC Pneumatics Inc. (Chicago) 27725 Diehl Road Warrenville, IL 60555 Tel: (630) 393-0080 FAX: (630) 393-0084 SMC Pneumatics Inc. (Tampa) 8507-H Benjamin Road Tampa, FL 33634 Tel: (813) 243-8350 FAX: (813) 243-8621 SMC Pneumatics Inc.

Clip AZ-T-VX Valve model Enter by referring to How to Order. Name plate Clip part no. For VX31: VX021N-10 Solenoid coil For VX32: VX022N-10 For VX33: VX023N-10 DIN connector part no.

Clip 5 Z G VX021N B AZ-T-VX Valve model Name plate Enter by referring to How to Order. Rated voltage 5 6 24 VDC 12 VDC Solenoid coil Clip part no. (For N.C.) For VXD21: VX021N-10 For VXD22: VX022N-10 For VXD23: VX023N-10 Clip part no. (For N.O.) For VXD21: ETW-7 For VXD22: ETW-8 For VXD23: ETW-9 2 Series VXD21/22/23 For Water Model/Valve Specifications Normally closed (N.C.)

Voltage Combinations Voltage 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC OUT (2) (1) IN 2 Port Valve Max. operating pressure differential (MPa) Orifice diameter (mm ) Model Pressure port 2 Note) Pressure port 1 0.4 1 0.9 VDW10 0.2 1.6 0.4 Note) To have a label on the cover, enter the part number below together with the coil part number. 0.2 1.6 0.7 VDW20 0.1 2.3 0.4 AZ-T-VDW

0h STMm PC31 LMPL 0 10 PC32 LMPH STMm PC33 LMNL 0 10 PC34 LMNH PC35 TL2 2 100.0 PC36 0h STMm PC37 *LPPL 0 10 PC38 *LPPH STMm PC39 *LNPL 0 10 PC40 *LNPH PC41 0h PC42 0h 6 21 6 PC43 0h PC44 0h PC45 0h PC46 0h PC47 0h PC48 0h PC49 0h PC50 0h 6.3.2 PC01 0h PC02 *ZTY (5.6) 0h 0 0 0 0DOG 1 2 3: 4: ON 5: DOG 6: 7: Dog cradle 8: DOG Z 9: DOG ADOG Z 0 1 2 3 4() 5 6 7 8Z 9 AZ

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 VFR6000-OMA0001-B Revision history A Renewal MZ B Safety Instructions PQ 1st printing: AZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

Melinda Lane Phoenix, AZ 85027 TEL: (623) 492-0908 FAX: (623) 492-9493 Erlanger, KY 41018 TEL: (SS9) 647-5600 FAX: (859) 647-5609 CHINA SMC (China) Co .. Ltd . SMC Pneumallques (Canada) Ud.(Quebec) 3260 Rue Watt Local 1 12 HONG KONG SMC Pnaumatlcs (Hong Kong) Ltd.

Phoenix, AZ 85027 Tel: (602) 492-0908 FAX: (602) 492-9493 Clinton Township, MI 48036 Tel: (810) 463-2300 FAX: (810) 463-2344 Charlotle, NC 28269 Tel: (704) 5979292 Fax: (704) 596-9561 SMC Pneumatics Inc. (Portland) 6707 N.E. 591h Place Portland, OR 97218 SMC Pneumatics Inc. (Chicago) 555 Kirk Road, Swte A St. Charles, IL 60174 Tel: (708) 3770080 SMC Pneumatics Inc.

PhoeniX, AZ 85027 Tel : (602) 492-0908 FAX : (602) 492-9493 SMC Pneumatics Inc. (Tulsa) 1 0203 A East 61 st Street Tulsa, OK 74146 Tel : (918) 252-7820 FAX : (918) 252-951 1 SMC Pneumatics Inc. (Detroit) 44345 Macomb Induslnal Dr. Clinton Township, MI 48036 Tel : (810) 463-2300 FAX: (810) 463-2344 SMC Pneumatics Inc. (Charlotte) 5015-C West W .T. Harris Blvd.

Combination description Holder mounting bracket Spacer length X417 X416 1 2 1 1 1 1 1 A, L, AS, LS X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on A unit side, X417 on the other side X416 on L unit side, X417 on the other side X417 on one side X417 on both sides X417 on A unit side X417 on L unit side Nil W Z A L AZ

Melinda Lane Phoenix, AZ 85027 TEL: (623) 492-0908 FAX: (623) 492-9493 Asia SMC Pneumatics (Canada) Ltd.(Windsor) 2870 Jefferson BLVD Unit 1 Windsor, ON N8T 3L2 TEL: (519) 944-0555 FAX: (519) 944-1870 JAPAN SMC Corporation SMC Corporation of America (Cincinnati) 4598 Olympic Blvd. Erlanger, KY 41018 TEL: (859) 647-5600 FAX: (859) 647-5609 SMC Corporation of America (Portland) 14107 N.E.