C95

12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90

Air Cylinder NCA1 Series

39 55 87 120 156 40 11 22 43 74 108 142 1 From Stroke Factors Table (see Table 1 on page 21), 50 9 15 30 66 96 130 determine the value of L. 60 14 18 57 88 119 2 In the left table, locate the previously determined thrust value. 80 12 16 36 71 104 10 14 22 57 90 3 Moving across the table, locate dimension L 120 12 21 45 77 (If the exact length is not shown, select the next larger value) 140

Compact

MXZ16 160 OUT side IN side 140 0.7/ Supply pressure [MPa] 120 Pressing force [N] F 0.5/0.67 100 80 L1 60 0.3/0.4 40 20 0 18 0 10 20 30 40 Allowable overhang L [mm] Allowable supply pressure on OUT side and IN side is the theoretical output of cylinder when pressing force is required. Caution F L2 Pressing work should be performed in line with the center of the guide.

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: With fall prevention function, Environment, Applications: Standard, Operating Temperature(°C): 0～70, End Locking: [Included] Presence, Valves: No, Operating Pressure(MPa): 0.08～0.97, Cushion: With

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 140, Stroke(mm): 175, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Symbol Indication symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 4, 6 6, 8 6 8, 10 6 8 10, 12 10 12 Metric size 1/8" 5/32" 3/16" 1/4" 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size 350 500 600 700 1200 1300 295 75 175 Flow rate (L/min (ANR)) Controlled flow Free flow

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Vacuum pressure reached [kPa] 91 Standard supply pressure [MPa] 0.35 Standard supply pressure Response Time [ms] ZHPBM-07ZHPBM-10ZHPBM-12ZHPBM-15 63 295 143 120 86 80 455 221 190 140 Nozzle size Pad dia.

ZP

8.5 Dimensions by Stroke Dimensions by Stroke 4 tube 6 tube D C E Model F G H F G H 10 13 16 H 4 tube 6 tube Model ZPYB16--A8 64 38 15 F G F G F G J K L J K L ZPYB10--A8 ZPYB10--A10 95 41 53 55.5 89.5 57 91 23 87 15.5 2.5 7 13.5 1.8 5 ZPYB15--A8 ZPYB20--A10 46 100 43 127.5 129 63 65.5 67 125 51 ZPYB25--A8 ZPYB30--A10 56 110 5 1.8 14.5 7 2.5 16.5 137.5 139 73 75.5 77 135 ZPYB40--A10 173.5 175

ZP

18 12.5 21.5 1.2 3.5 30.4 46.5 10 16 J Model Dimensions by Stroke G H G H 10, 13 16 ZPRD10-0-A10 60 23 83 61 84 J Model G H G H ZPRD20-0-A10 70 132 71 133 51 U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPRD30-0-A10 ZPR 10-0-A10 80 142 81 143 91 57 57.5 23 91.5 ZPRD40-0-A10 90 178 91 179 129 67 67.5 129.5 77 51 ZPRD50-0-A10 100 188 101 189 139 77 77.5 139.5 87 175

Rotary Cylinder Series MRQ Size: 32, 40 1

F(N) F(N) Stroke 105 15 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Rotation angle Linear motion Number of Auto Switches Mounted 02 0S 0 S2 SS S0 1 Nil 2S 20 2 n2 nS n0 n Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 11-10-19

Compact Cylinder

size [mm] Cylinder stroke [mm] 5 10 15 20 25 30 35 40 45 50 5 10 15 20 25 30 35 40 45 50 12 25 29 34 38 43 48 12 21 25 30 35 39 44 16 32 37 43 48 53 58 16 28 33 38 43 49 54 20 53 61 68 75 83 90 98 105 112 120 20 40 47 55 62 69 77 84 91 99 106 25 73 82 91 100 109 119 128 137 146 155 25 55 64 73 83 92 101 110 119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175

Intrinsically Safe Valve

type (TT) 53-SS5Y5-20Stations Stations 189.6 156 143.4 177 71.7 88.5 Max. 10 L (Lead wire length) L (Lead wire length) 41.7 39 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 328 L1 L2 60 76 92 108 124 140

Exhaust Cleaner for Vacuum Pump AMV Series

When gaskets are required, order 4 pcs. of the AMV-SA003. 788 Exhaust Cleaner for Vacuum Pump AMV Series Flow Rate Characteristics Oil: turbine oil #140 Element initial state Element oil saturated state Caution on Handling Caution AMV37 AMV160 AMV3 AMV75 AMV6 0.02 1. Install with the port down in a vertical position. 2. Tighten the product at the hexagonal part of the port. 3.

Series AP500

40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1000HF 100 psig (0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 70 0.48 60 0.41 Delivery pressure (MPa) Delivery pressure (psig) 50 0.34 Connections A 40 0.28 (mm) inch FV4 MV4 TW4 FV6 MV6 TW6 (94.0) 3.70 30 0.21 2.96 (75.2) 20 0.14 4.70 (119.4) 10 0.07 2.96 (75.2) 0 0.00 0 20 40 60 80 100 120 140

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

t Gasket V#6500 O.D.268 X I.D.225 X T3 O.D.218 X I.D.175 X T3 y AL-62S AL-63S AL-31S NBR JIS B2401G35 1 pc. JIS B2401G35 1 pc. JIS B2401G35 3 pcs. JIS B2401G35 3 pcs. JIS B2401G35 5 pcs. u O ring 4.6-10 Series AMD Dimensions: AMD150 to AMD650 Accessories D: With auto drain (N.O.) C: With auto drain (N.C.) N.C. auto drain not available for AM650.

MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

Multistage Ejector (N)ZL Series

40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140

Process Pump Series PA3000/5000/PAX1000 Series PB1000

.> 140 Air consumption l/min (ANR) 120 SUP=0.5MPa 100 Note 1) If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to a discharge pressure of 0.1MPa. SUP=0.3MPa 80 SUP=0.2MPa 60 Note 2) 1 cycle discharge rate PA3000: Approx. 22ml PA5000: Approx. 100ml Selection procedure 1.