Table of Contents

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

CRBU

Refer to p.1.0-23 and 1.0-24 for further specifications. 180+ 4 0 90 + 4 0 0 to 175 0 to 85 1: The maximum adjustable angle of the angle adjustment unit for size 10 is 230. All connecting port positions are on the body side. w The allowable kinetic energy is the same as the specifications of the rotary actuator unit itself.

0.4

185.5 196 206.5 217 227.5 238 248.5 259 125 137.5 150 162.5 175 175 187.5 200 212.5 225 237.5 237.5 250 262.5 275 287.5 135.5 148 160.5 173 185.5 185.5 198 210.5 223 235.5 248 248 260.5 273 285.5 298 408 Base Mounted Plug-in Manifold VQ1000/2000 Series VV5Q21 SV L4 L4 SYJ L3 (5.25) L3 L2 Applicable connector: Flat ribbon cable connector (20P) (Complies with MIL-C-83503) L2 SZ L1 6.5 34.5

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

-SQ2431 44 or less 0.46 0.65 0.14 0.17 3.1 1.9 34 or less 175 Rubber seal Pressure center 10-SQ2531 44 or less 0.56 0.47 0.30 0.17 1.8 2.5 34 or less 175 Rubber seal Note 1) Values for the top ported cylinder port size of C8.

70pvpump

N03 T03 NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P11 P11F Compact, lightweight (Without foot) P11N P11T PAP331 (Assembled in clean room) NPTF 1/4 Threads Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads P13 P13F 140 mm 120 mm P13N P13T NPTF 1/4 Threads 110 mm Option Reset button Weight: 2.1 kg Air operated type is also standardized.

Modular/F.R.L. Units Series AC

98 110 43.5 28 27.8 1 44.5 61.5 42.5 84 1/4 3.2 42.5 196 84 409 175 98 110 43.5 Optional specifications Semi-standard specifications Bracket mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M Q1 Q2 R1 R2 S U V B B B B B AC10A AC20A AC30A AC40A AC40A-06 AC50A AC60A 4.5 25 125 107 7 20 2.8 27 24.5 4.5 5.5 164 30 177 160 12 24 3.2 33 29

VDW

175 210 245 280 L2 82 117 152 187 222 257 292 327 362 L3 94 304 339 374 129 164 199 234 269 2 stns. x 1 Manifold composition 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Compact Hydraulic Cylinder Series CH
KGB

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

SMC Pneumatic Clean Series

When replacing the rod seal, take care that the snap ring does not spring out while you are removing it. 175 Actuator / Common Precautions 1 Be sure to read before handling. Refer to the main text for precautions for each series. Precaution on designing Selection Warning Warning 1.

MLGP

150, 175, 200, 250, 300, 350 66 76.5 111.5 19 M14 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st25 st50 25140 166 28 50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x

MLGP

150, 175, 200, 250, 300, 350 66 76.5 111.5 19 M14 64.2 55.5 WA Bore size (mm) JB K Q R S L ML T U VA VB OA OB PA PB PW MM NN st25 st50 25140 166 28 50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x

MGP

General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part1:General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 MGP series 113) 3) 1 1 () 4 2 T (d=) 2 T 2 2 RSQ 400mm (mm) 3 1mm MGPM MGPL (mm) MGPS (mm) (mm) 10% 25% 140%

C95Series

~, 65 45 133 30 6 50 3: ; 65 175 9 15 11 ' 45 1202 12' , ~ I so 1 222 I~ ' : .~' , E5063 63 75 ~50_ L3L 35 16.5 52 40 L67 17.5 9 15 " ESoao 80 95 . 60 I 4j 140 16.5 56 50 I 86 10 11 la " 2.5 183 1250 16 , ., , E5100 ,.100_ 1114 70 ,~5 50 L7 .~ 76 O , 9" _ ,'' _11 18 1 le5 ", 1270 20' I'"' Rotating angle ~aore slze A" 8" N+'BO+90~ (mm) 3240 25' W 160' Q 5063 40' 50' 190' SO.I00 30' SS' 175

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

SYJ300/500/700

N.O. 140 (80) 1/8 Base mounted (with sub-plate) 135 (75) 136 (76) 157 (97) V100 1/4 Note) Value for DC. Add 3 g for AC. ( ): Without sub-plate.

17

Standard Strokes Bore size (mm) Standard stroke (mm) 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 12, 16 20, 25 32 to 100 Manufacture of Intermediate Strokes Spacer installation Spacers are installed in the standard stroke cylinder. 12 to 32: Available by the 1

IZx-OMT0049

50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to

IZx-OMP0064

Distance from the ionizer to the neutralized workpiece (mm) IZS40/41 IZS42 With air purge With air purge Ion generation frequency (Hz) Without air purge Without air purge High speed static neutralization cartridge 0.1 100 to 175 50 to 1300 50 to 2000 50 to 2000 0.5 100 to 175 50 to 1300 50 to 2000 50 to 2000 1 300 to 500 300 to 1500 400 to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000

energy saving effect

Page 175 Required Cooling Capacity Calculation . Page 184 List of Function . Page 175 Precautions on Cooling Capacity Calculation ... Page 185 Alarm . Page 175 Circulating Fluid Typical Physical Property Values ... Page 185 Communication Function . Page 176 Specific Product Precautions . Page 186 Options With Caster Adjuster-foot . Page 177 With Earth Leakage Breaker .