Basic type / Direct mount type Series CY3B/CY3R Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.
6 117 104 5 101 88 4 85 72 3 69 56 2 53 40 VFN L3 16 32 48 64 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 L4 8 24 40 56 72 88 104 120 136 152 168 184 200 216 232 248 264 280 296 L plug connector (L) DIN terminal (D) M plug connector (M) Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor 4-6-21 22 Series VZ300
Rc 3/8 EXH: Rc 1/4 60 OUT (328) Tank OUT port Rc 1/2 278 180 170 4 x 11 32 32 Drain port Rc 1/4 120 180 312 460 Connected to VBA20A Connected to VBA22A Tank IN port Rc 3/8 Booster regulator IN port Rc 3/8 Booster regulator IN port Rc 3/8 EXH: Rc 3/8 EXH: Rc 3/8 (454) 442 (417) Tank OUT port Rc 1/2 (367) (367) OUT OUT 278 180 180 170 4 x 11 4 x 11 32 32 120 180 180 120 Drain port Rc 1/4 312
Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating fluid pressure [MPa] 80 0.8 0.7 70 Pump head [m] 0.6 60 Outlet 0.5 50 0.4 40 0.3 30 0.2 20 Return port 0.1 10 0 0 125 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow rate [L/min] 171 HRSH Series Inverter
Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200
Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase
MPa) AZ1200 2.12 (53.8) 120 0.83 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or HR) Max. 6.5 (165.1) (When selecting option code FC) 100 0.69 Delivery pressure (psig) 80 0.55 1.5 (38.1) 60 0.41 40 0.28 2.62 (66.5) 20 0.14 0 0.00 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) AZ1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 0.69 (17.5
B2 Supply valve (N.O.) 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (300 mm) M: With lead wire (300 mm) MN: Without lead wire U With light/surge voltage suppressor (Non-polar type) r Rated voltage DC CE-compliant 5 24 VDC V 6 12 VDC V V 6 VDC V S 5 VDC V R 3 VDC V * For type U, only DC voltage is available
G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)
isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!
connector length other than 300 mm, order the connector assembly on page 32 separately. t Vacuum (V) port y Option5 (For details on the Function/Application, refer to page 42.)
500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.
84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 8 16 8.
Refer to page 118 for details. 141 VXD Series For Air/Water/Oil 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet C E U 300 T f A B OUT IN OUT IN M 2 x P Port size F b a J I 2 x 8.5 2.6 d e L K (D) Grommet (with surge voltage suppressor) C E U 300 T A OUT IN OUT IN M B (D) L K 2 x P Port size I F J Cable 6 to 12 U V E C DIN terminal G1/2 (44) T 31.5 B A IN OUT M 2 x P Port
125 L M9BW With auto switch CDS2 L 125 300 With auto switch (Built-in magnet) Made to Order For details, refer to the next page.
301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125
301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Bore Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 57 70 82 95 120 145 170 64 77 89 102 127 152 177 32 12.5 25 37.5 50 75 100 125
Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore
0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet 0.5 50 0.3
I~} a: D-A59W -25 60 70 65 11 0 115 120 1 pC. 15 .. I ~ .pa. (':'!." 15 . I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!l. 2 pes , ~~~