Programless controller Step motor (servo 24 VDC)

1500 45 1500 90 1500 80 1500 9 100 2000 50 2000 100 2000 90 2000 10 150 2500 75 2500 150 2500 100 2500 11 200 3000 100 3000 200 3000 110 3000 12 250 3500 125 3500 250 3500 120 3500 13 300 4000 150 4000 300 4000 130 4000 14 350 4500 175 4500 350 4500 140 4500 15 400 5000 200 5000 400 5000 150 5000 60 No.

CNS

63 35 14 155 23 25 30 M14 x 1.5 16 Up to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 Bore size (mm) K KA LD LH LS LT LX LY MM MA N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85 393 8 100 M12 x 1.75 M30 x 1.5 35 1/2 25 303 20 23 45 20 110 478 87.5 157.5 85.5 15 31 19 100 433

Hygienic Design Cylinder Series HY

175L HY-M4 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M5 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L 65 70 75 80 85 90 95 100 105 110 65 70 75 80 85 90 95 100 105 110 75 80 85 90 95 100

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

38 73 16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.

JXCx-OMU0004

1600 70 1600 80 1600 80 1600 14 75 1800 75 1800 90 1800 90 1800 15 80 2000 80 2000 100 2000 100 2000 LEHZ32 LEHZ40 2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 1 10 150 10 150 2 15 200 15 200 3 20 300 20 300 4 25 400 25 400 5 30 500 30 500 6 35 600 35 600 7 40 700 40 700 8 50 800 50 800 9 60 900 60 900 10 70 1000 70 1000 11 80 1200 80 1200 12 90 1400 90 1400 13 100 1600 100 1600 14 110

KQ2

Principal Parts Material Made to Order (Refer to page 90 for details.)

Compact Cylinder

M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M6 x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 115 l x 135 l x 155 l 55 60 65 70 75 80 85 90 95 100 110 130 150 60 65 70 75 80 85 90 95 100 105 115 135 155 C(D)55B32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 9.4 10 Fix the cylinder by using the

AC

95 106 106 106 106 106 11 11 11 11 11 25 18 16 35 35 66 66 66 66 66 70 70 70 70 70 210 210 210 210 210 90 90 90 90 90 13 13 13 13 13 3.2 3.2 3.2 3.2 3.2 106 106 106 106 106 AL3000-02 to 03-1 AL4000-02 to 04-1 AL4000-06-1 AL5000-06 to 10-1 AL6000-10-1 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 ( ): With float switch 1.17-7 Large Flow Lubricator Series AL800/900 Standard Specifications Individual

2 Phase Stepper Motor/Without Motor Brake Series LXP

52 4-M6 x 1 Section C 30 D 120 90 Refer to page 300 for mounting.

CS1

14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90 115 18.5 20

REA/REB

PA Model HS PW LD M N PB L JK NN P MM HT J High Precision Guide Type REBH Order Made Auto Switches REAL15 REAL20 REAL25 REAL32 REAL40 7.5 70 95 8 45 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 120 5.6 10 10 50 90 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 11 100 130 10 60 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 160 9.2 12 11.5 70 120 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25

Electric Actuators

10 (LEPS10J) 1.1 1.1 0 350 300 0 50 100 150 Speed [mm/s] 0 350 300 0 50 100 150 Speed [mm/s] 200 250 200 250 Force Conversion Graph (Guide) LEPS6 (Basic) 5.6 Lead 4 (LEPS6K) 4.5 Force [lbf] 3.4 Lead 8 (LEPS6J) 2.2 1.1 0 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 70 10 80 100 50 5 LEPS10 (Basic) LEPS10L

Cylinder with Lock Series CNS

63 35 14 16 155 23 25 30 M14 x 1.5 to 1400 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 16 180 28 30 30 M14 x 1.5 to 1400 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 18.5 215 35 35 35 M16 x 1.5 (mm) Bore size (mm) K KA LD LH LS LT LX LY MM N P Q R S T V VA X Y H ZZ 125 140 160 15 31 19 85 393 8 100 157.5 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 45 20 110 478 15 31 19 100 433 9 112 180.5

Aluminum High Vacuum Angle Valve

XL-25 XL-40 XL-50 XL-63 XL-80 XL-100 XL-160 Item Rated heater voltage 90 to 240 VAC 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs.

Rotary Gripper Series MRHQ

Model (1) Cylinder bore (mm) Opening/Closing stroke (mm) Rotating angle () Mass (g) Action Model 306 90 MRHQ10D 10 4 305 180 593 90 MRHQ16D 16 6 591 180 Double acting 1055 90 MRHQ20D 20 10 1052 180 1561 90 MRHQ25D 25 14 1555 180 MRHQ10S MRHQ10C 307 90 10 4 306 180 MRHQ16S MRHQ16C 594 90 16 6 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 20 10 1057 180 1566 90 MRHQ25S MRHQ25C 25 14 1560 180

MRHQ

MHC Model MHT Note) Opening/Closing stroke (mm) Cylinder bore (mm) Rotating angle () Weight (g) MHY Action Model MHW 306 90 MRHQ10D 4 10 305 180 MRHQ 593 90 MRHQ16D 6 16 Misc. 591 180 Double acting 1055 90 MRHQ20D 10 20 D1052 180 1561 90 20MRHQ25D 14 25 1555 180 307 90 MRHQ10S MRHQ10C 4 10 306 180 MRHQ16S MRHQ16C 594 90 6 16 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 10 20 1057 180 1566

Thermo-con

HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 100 100 Facility water: 50F (10C) 0 10 20 30 40 50 60 70 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) HEC003 Circulating fluid: Clear water Circulating fluid: 20% ethylene glycol F 50 70 90 110 130 150 F 50 70 90 110 130 150 1000 1000 Facility water flow rate: 1.3 gpm (5 L/min)

Electric Actuator

Electric Actuator New New Slider Type High Rigidity RoHS Low-profile/Low center of gravity Height dimension reduced by approx. 31% (Reduced by 28 mm) Series Work load lb (kg) Speed (mm/s) Motor output (W) LEJS40 New New 121 (55) 600 100 LJ1H20 66 (30) (Existing model) 500 100 LJ1H20 90 mm 62 mm LEJS40 Type AC Servo Motor (100/200 W) Size: 40, 63 Ball Screw Drive Series LEJS Max. work load

C92

215 230 270 320 142 161 170 185 210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16 19 26 26 25 32 12 15 15 18 25 25 25 32 50 85 95 110 140 162 160 200 47 62 74 90 110 130 154 194 64 72 90 100 126 150 180 230 78 90 110 120 154 180 210 265 46 58 68 89 100 114 140 180 32 40 50 63 80 100 125 160 1.12-7 Series C92 Accessories

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It