2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) mm kg C kg mm/s mm 50 1.9 75 2.1 100 2.3 125 2.5 150 2.7 5 to 40 (with no condensation) 10 (4) horizontal/5 (4) vertical Note 1) Standard stroke N.C. (B contact) Body weight N.C. (B contact) Operating temperature range N.O. (A contact) N.C.

Combination Cylinder

40 25 to 500 50, 63 25 to 600 MXF 3.1-49 80, 100 25 to 700 MXW 125, 140 160 Up to 1600 Clamp cylinder with lock Series CLK1 MXP 50 75 100 125 150 MG 32 to 63 3.1-63 MGP MGQ Compact cylinder with lock Series CLQ 20,25 MGG 5 to 50 MGC 5 to 50, 75, 100 3.1-87 32 to 100 MGF MGZ CY Refer to p.5.4-90 for Series CL Made to Order specifications.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

ZP

19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C ZPT 10-B-A14 44.5 109.5 111 112 45.5 110.5 114.5 50 54.5 113.5 116.5 117.5 55.5 5 10 6.2 13 65.5 124.5 64.5 123.5 126.5 127.5 85.5 75 169.5 84.5 168.5 171.5 172.5

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Table of Contents

5 !

Mechanically Jointed Rodless Cylinders

Load Weight Allowable Moment MY3A, MY3B/m1 MY3A, MY3B/M1 MY3A, MY3B/M2 MY3A, MY3B/M3 40 30 80 200 200 50 100 40 30 20 100 10 50 40 30 50 40 30 20 5 4 3 10 20 20 Load weight (kg) 63 q Moment (Nm) Moment (Nm) Moment (Nm) 5 4 3 63 50 40 63 63 10 10 2 50 50 50 t w e r 5 4 3 2 5 4 3 1 32 40 40 40 0.5 0.4 0.3 1 25 2 2 32 32 32 20 0.5 0.4 0.3 1 0.2 1 25 16 25 25 20 0.5 0.4 0.3 0.1 0.5 0.4 0.3 0.2

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

n (Same surface) 100 + 100 (n 2) n = 2, 3, 4, 5 1 10 2 (Different surfaces) 35 2 (Same surface) 50 Made to Order Related Products D-A44 n (Different surfaces) 35 + 30 (n 2) n = 2, 3, 4, 5 n (Same surface) 50 + 50 (n 2) n = 2, 3, 4, 5 * n = 3, 4, 5 182 A C96 Series Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Center trunnion 32 40 50 63 80 100 125

MXS

(Unit: mm) A 2 2.5 4 5 5.5 10 B Model MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 3 3.11-5 Air Slide Table Series MXS How to Order MXS 12 50 F9N S Air slide table Number of auto switches Bore size (Stroke mm) 2 1 n 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

CXS

0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) Graph V = up to 600mm/s 5 Graph V = up to 700mm/s (up to 800mm/s

JXCx-OMT0023

DISPLAY AND OPERATION SECTIONS 5 1 to 5 -30 5.1 Overview 5 2 5.2 Display sequence 5 3 5.3 Status display 5 4 5.3.1 Display transition 5 5 5.3.2 Display examples 5 6 17 5.3.3 Status display list . 5 8 5.4 Diagnostic mode 5 -10 5.5 Alarm mode 5 -12 5.6 Point table mode 5 -14 5.6.1 Point table transition 5 -14 5.6.2 Point table mode setting screen sequence 5 -15 5.6.3 Operation example

Electric Grippers

to 70/ 5 to 50 5 to 80/ 5 to 50 5 to 100/ 5 to 50 5 to 120/ 5 to 50 7 to 17 1.4 to 3.5 Opening and closing speed/ Pushing speed [mm/s] Note 2) Note 3) Actuator specifications Electric specifications Drive method Slide screw + Wedge cam 0.02 Repeatability [mm] Note 4) Repeated length measurement accuracy [mm] Note 5) 0.05 0.5 or less Finger backlash/dia.

LJ1H

B A C D 5 6 Standard Motor Series LJ1H10 Motor Output Slide Screw High Rigidity Direct Acting Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right

CL

1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 40 50 63 80 100 125 140 160 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 244 36 45 45 60 60 75 75 75 252 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 16.5 16.0 16.0 18.0 18.0 40 40 40 84 90 98 116 126 98 98

Thermo-chiller/Rack Mount Type

/1100 Heating capacity (50/60 Hz)4 [W] 250/300 Temperature stability5 [C] 0.1 Pump capacity (50/60 Hz)6 [MPa] 0.09 (at 5 L/min)/0.11 (at 5 L/min) For Option T1: 0.35 (at 5 L/min)/0.35 (at 5 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 5/5 For Option T1: 5/5 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric

LEC-OM069xx

Tuning Procedure.5-44 5.5.3 One-parameter Tuning Example.5-48 5.5.4 Related Parameters.5-49 5.6 Anti-Resonance Control Adjustment Function (Fn204).5-50 5.6.1 Anti-Resonance Control Adjustment Function.5-50 5.6.2 Anti-Resonance Control Adjustment Function Operating Procedure.5-51 5.6.3 Related Parameters.5-51 5.7 Vibration Suppression Function (Fn205).5-52 5.7.1 Vibration Suppression Function

LEC-OM071xx

to 100 0.01 50 Immediately Tuning The filter is disabled if 5000 is set. 5-68 6.