VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5
mm) 20 mm 50, 100, 150, 200, 250, 300, 350, 400 450, 500 1000 25 mm 15 32 mm 20 25 32 1500 40 mm 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 Note 1) For strokes exceeding the maximum, consult SMC.
Switch (When equipped with switch) 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 L1 L2 L3 L4 248 260.5 260.5 273 285.5 298 310.5 223 235.5 173 185.5 198 210.5 210.5 148 160.5 237.5 250 250 262.5 275 287.5 300 212.5 225 187.5 200 200 137.5 150 162.5 175 213.7 223.7 233.7 243.7 253.7 263.7 273.7 163.7 173.7 183.7 193.7 203.7 133.7 143.7 153.7 123.7 17.5 12.5 14 15 16
Series SQ2000 Series SQ1000 C 6 10 16 20 25 32 40 Series CM2 Bore size (mm) 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Average speed (mm/s) 800 700 600 500 400 300 200 100 0 Average speed (mm/s) Series CJ2 kit Series CJ2 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation Perpendicular, upward actuation Horizontal actuation How to Increase Manifold Stations
Note 2) DIN is applicble to VQZ 200 and 300. Note 3) Electrical entry of pilot valve for VQZ100(L and M) is opposite side of valve body part number.
Piston speed mm/s Piston speed mm/s Features 6 Series MY2H Maximum Allowable Moment/Maximum Allowable Load Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2H40 40 40 40 MY2H40 MY2H40 30 30 30 MY2H25 20 20 20 MY2H25 MY2H25 MY2H16 10 10 10 MY2H16 MY2H16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500
34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.
X500 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC Electrical entry DIN (EN175301-803) terminal Grommet Conduit terminal L-type plug connector M-type plug connector DIN terminal [IP65 compatible] [IP65 compatible] [IP65 compatible] G: Lead wire length 300 mm H: Lead wire length 600 mm L: With lead wire (length 300 mm) M: With lead wire (length 300 mm) D: With
18 353 365 387.5 398 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 L1 L2 L3 L4 2.10-16 VQZ100/200/300 Body Ported Manifold Options Blank plate VVQZ100-10A-2 VVQZ200-10A-2 VVQZ300-10A-2 This is used when removing the
VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500 Single-phase 200 V 4.3/4.7 4.3/4.7 Operating current [A] Refrigerant R407C (HFC) IDF F 50/60 Hz *6 Three-phase 200
Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.
(N) Pushing force (N) Size 16 25 32 40 16 25 32 40 141 452 707 1058 Up to 300 Up to 400 Up to 500 Up to 500 Up to 200 Up to 300 Up to 300 Up to 300 141 452 707 1058 AC Servo Motor Basic type Series LEY In-line motor type Guide rod type Series LEYG Guide rod type /In-line motor type Series LEYD Series LEYGD Dust/Drip proof compatible Dust/Drip proof compatible Series LEY Series LEY Series
63 63 100 80 CP95 200 200 50 40 50 50 100 100 C95 63 Load weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load
500 Overhang: L5 [mm] Overhang: L5 [mm] 400 400 500 mm stroke or less m 300 300 L5 600 mm stroke or less 600 mm stroke 200 200 100 100 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 300 300 250 250 Overhang: L6 [mm] Overhang: L6 [mm] 500 mm stroke or less 200 200 600 mm stroke or less m L6 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8
For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR
NBR Valve seal Tube gasket Standard (non-lube) Piston gasket 125 140 160 180 200 250 300 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Retaining plate gasket Guide gasket Component part numbers: @3, @5, @6, @7, @8, #0. Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g).
250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09 1.20 1.181.25 1.42 1.68 1.86 2.03 2.21 2.382.56 2.09 2.20 2.49 2.77 3.17 3.46 3.74 4.03 4.32 4.60 4.89 LEY 16 D LEY 25 D LEY 32 D [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 (kg) 0.580.62 0.73 0.87 0.98 1.09
219 275 285.5 13 208.5 262.5 273 12 198 262.5 273 9 166.5 225 235.5 8 156 212.5 223 7 145.5 200 210.5 6 135 200 210.5 5 124.5 187.5 198 4 114 175 185.5 3 103.5 162.5 173 2 93 150 160.5 L1 L2 L3 Dimensions/Side entry connector [-FS] (mm) L n 11 262.5 273 10 250 260.5 16 312.5 323 15 312.5 323 14 300 310.5 13 287.5 298 12 275 285.5 9 250 260.5 8 237.5 248 7 225 235.5 6 212.5 223 5 200 210.5
Flow rate (slpm, N2) AP1400T 2000 psig (13.8 MPa) 200 psig (1.4 MPa) Inlet pressure: 600 psig (4.1 MPa) 1.5 (38.1) 0.55 80 0.48 70 Delivery pressure (MPa) 2.62 (66.5) Delivery pressure (psig) 0.41 60 0.34 50 0.28 40 0.69 (17.5) 0.21 30 0.14 20 A B 0.07 10 0.88 (22.4) 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1402TA Inlet
Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175