5 Port Solenoid Valve, Series VQC

260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L3) (L4) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3

Series VQ Base Mounted Metal Seal/Rubber Seal

260.5 11 187.5 250 260.5 L1 L2 L3 1.10-181 VQ0/1000 Kit (Connector) C Standard with lead wires plug-connected to each valve individually.

Air Cylinder

trunnion 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

ITV

Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR

New

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

Parallel Style Air Gripper Series MHZ

MHZ2-6D/MHZA2-6D MHZ2-25D/MHZL2-25D 100 Pressure 0.7 MPa 6 Pressure 0.7 MPa 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) 80 0.6 MPa 0.5 MPa F 4 0.5 MPa 60 0.4 MPa 0.4 MPa 0.3 MPa 40 0.3 MPa 2 0.2 MPa 0.2 MPa 20 F 0 10 20 30 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) External Grip MHZ2-10D/MHZL2-10D MHZ2-32D MHZA2, MHZ2, MHZL2 250 Pressure 0.7 MPa 20

ZP

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 Model A 40 ZP40H B 42 50 ZP50H 52 C 32 42 Model A 100 ZP100H B 103

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Adsorption Plate

Adsorption surface size SP2130 SP2230 SP2330 SP2430 SP2530 SP2630 50 x 50 40 10 100 x 100 80 10 P1 150 x 150 105 10 P1 200 x 200 130 10 250 x 250 155 10 P2 P2 300 x 300 180 10 Special Order Products Products with a stainless steel body or in other shapes can be manufactured. Consult SMC separately.

Air Catch Sensor Series ISA

DC (+) Brown Main circuit of switch Main circuit of switch OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 Load OUT Black + GND VCC NC OUT 6 12 to 24 VDC Max.80 mA DC () Blue L side R side PNP-type open collector DC (+) Brown 12 to 24 VDC Max.80 mA OUT Black + q w e r t y ZSE ISE Load DC () Blue ZSP PS ISA Specific Product Precautions PSE Read before handling.

VQZ1000/2000/3000

1 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ1000/2000/3000 Compact design with large flow capacity VQC SQ Model Flow characteristics Cylinder size VQ0 Manifold pitch (mm) Metal seal C [dm3/(sbar)] Rubber seal C [dm3/(sbar)] Up to 50 Up to 80 Up to 100 VQ4 VQZ1000 10 15 18 0.54 1.4 2.4 0.71 1.6 3.2 VQZ2000 VQ5 VQZ3000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Air Cylinder

to 150 151 to 200 201 to 250 S ZZ S ZZ S ZZ S ZZ S ZZ 20 8 20 M4 x 0.7 87 120 112 145 137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6 x 1 89 122 114 147 139 172 164 197 40 13 21 M8 x 1.25 113 150 138 175 163 200 188 225 213 250 Symbol * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used, use a washer etc. to prevent the

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,

RHC

127 196 80 80 80 80 80 80 80 80 Effective cushioning stroke (mm) Lubrication Not required (Non-lube) JIS Symbol +1.4 0 Up to 1000 st: , 1001 to 1500 st: +1.8 0 Stroke length tolerance Mounting Basic style, Axial foot style, Rod/Head side flange style REF Stroke (mm) Max. stroke Bore size (mm) Standard stroke (2) Minimum stroke (Recommended) (1) 20 1500 up to 700 250 25 1500 up to 700 250

Series AP500

psig (0.55 MPa) 20 psig (0.14 MPa) AP1500 50 0.34 0.69 100 0.62 90 40 0.28 0.55 80 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes

JIS Standard Hydraulic Cylinder

0.043 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 25 22 7 14 55 250 M16 x 1.5 18 +0.052 0 0.025 0.064 0.020 0.053 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 9 19 60 280 M20 x 1.5 22.4 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 11 24 70 327.5 M24 x 1.5 28 0.030 0.076 +0.062 0 0.025 0.064 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 13 30 80 367.5 M30