MXQ

to 0 1) 0.1 mm for 75 mm or longer stroke 4 to 0 4 to 0 6 to 0 10 to 0 12 to 0 Bore size (mm) 8 12 16 20 25 D50 to 500 mm/s Piston speed Holding force (N) 25 60 110 160 250 Table (1) B Side Parallelism to A Side -X (mm) Note) For caution on end lock, refer to page 8-5-7.

C85

1 y q 5A 5B CJ2 CM2 Non-rotating CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rod cross section Built-in magnet Standard 8 MB Component Parts No.

Prevents Micro-Bubbles

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimal dead space The diaphragm is supported by a buffer that minimizes deformation, which gives it long life and resistance to backpressure.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Bore size (mm) Standard stroke 125, 150, 175, 200, 250, 300 32, 40, 50, 63, 80, 100 Caution Manufacture of Intermediate Stroke Snap Ring Installation/Removal Description Spacer is installed in the standard stroke body. Exclusive body (-XB10) Refer to How to Order for the standard model no. on page 7-6-121. Suffix -XB10 to the end of standard model no. on page 7-6-121. 1.

Thermo-chiller/Rack Mount Type

VAC) p. 14 qConcentration Meter p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 14 wParticle Filter Element for Replacement p. 36 Specifications eDI Filter Replacement Cartridge p. 36 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 15 rAnti-quake Bracket p. 36 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 16 tPiping Conversion Fitting

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Conforms to ISO standard 5599/I Interface conforms to ISO standard Size 1 (VQ7-6) and Size 2 (VQ7-8).

C92

160, 200, 250, 320, 400, 500 2900 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CA1 2900 160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Intermediate strokes are available.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight (kg) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com m1 m2 m3 Moment (Nm) M3 = F3 x L3 F3 M1 = F1 x L1 F1 M2 = F2 x L2 F2 L1 L2 L3 1.

PF2A/PF2W

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting Warning 1. Mount switches using the proper tightening torque. When a switch is tightened beyond the specified tightening torque, the switch may be damaged.

I

230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-8-1 2 Various auto switches available Travelling parallelism: 0.004 mm Parallelism: 0.02 mm High rigidity and high precision Cylinder is built into the rail of the linear guide.

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

MK

MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G Operating pressure (MPa) RS H A Installation and Adjustment/Regarding Clamp Arm Removal and Reinstallation RZQ 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ115-M VQ110-L 4-14-19 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-14-20

VQC

260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L4) (L3) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3

5 Port Solenoid Valve, Series VQC

260.5 13 181.5 230 250 260.5 14 192 240.5 262.5 273 15 202.5 251 275 285.5 16 213 261.5 287.5 298 VV5QC21 S Kit (Serial Transmission Kit: EX500) (L3) (L4) L2 L1 38.5 P = 16 34.5 38.5 76.5 1 1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3

IR1000/2000/3000

AF Recommended Proper Torque (Nm) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR1000 IR2000 IR3000 12.5 21 21 IR 4.

ZSE F/ISE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Helium leakage test Helium leakage test is conducted on the welding parts.