Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

REA/REB

, 200, 250, 300 10 RHC 150, 200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)

Sine Rodless Cylinder Series REA/REB

Bore size (mm) Maximum manufacturable Maximum stroke with switch Standard stroke (mm) stroke (mm) stroke (mm) Symbol Specifications 500 500 150, 200, 250, 300 10 XC57 With floating joint 150, 200, 250, 300, 350, 400 450, 500 15 750 1000 20 1000 1500 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 1500 2000 32 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 2000 1500 Note)

SMC Pneumatic Clean Series

C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

SMC

When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

REA/REB

, 200, 250, 300 10 RHC 150, 200, 250, 300, 350, 400, 450, 500 15 750 MK(2) 20 1000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Made to Order Specifications (For details, refer to page 10-21-1.)

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

kg 250 Load weight m (kg) 200 63 150 Since the conditions are vertical upward mounting with a speed of 500 mm/s, use graph (2).

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

High Power Cylinder Series RHC

75 25 61 40 D100 0 16 80 10 800.074 26 13 95 90 30 63 25 20 40 37 116 LH LS LT LY LX LZ M MM NE NF S P X Y WH ZZ Bore size (mm) -X 50 M18 x 1.5 73 7.5 10 88.5 53 6.8 to 11.3 30 10 335 52 275 1/2 215 25 27 Individual -X 63 M18 x 1.5 60 80 7.5 342 55 289 10 95 1/2 215 37 10 24.5 27 80 M22 x 1.5 10 308 12 115 75 100 3/4 8.5 to 13.5 40 13 371 65 228 30.5 32 100 M26 x 1.5 139 90 118 10 13 391

LEC-OM071xx

Analog monitor output voltage 1 [V] Gain adjustment 1000 [min-1] Motor speed Item Specifications Gain-adjustment Range 10050% Adjustment Unit 0.4%/LSB The gain adjustment range is made with a 100% output set as a center value (adjustment range: 50% to 150%). The following is a setting example.

RHC

40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63 30 90 Up to 1500 116 40 37 80 0.074 0 Data ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 27 ND 25 MM 31 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 Bore size (mm) 50 52 63 342 10 37 1/2 215 27 24.5 31 M18 x 1.5 7.5 80 60 95 10 289 55 80 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 100 391 13 47 3/4

Series IDG

600 (21.19) 750 (26.49) 1000 (35.31) IDG3M IDG5M IDG10M IDG20M IDG30M IDG50M IDG60M IDG75M IDG100M 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 75 (2.65) 110 (3.88) 170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

13

65 110 150 85 135 185 SUP VAC EXH 28 28 33 66 11 12 16 27 43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc

Compact Hydraulic Cylinder Series CH
KGB

95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175 100 (M) 10 (M) 60 M12 x 85l x 60l 85 CHKGB63 5 (M) 15 (M) 65 x 90l x 70l 90 10 (M) 20 (M) 70 x 95l x 75l 95 15 (M) 25 (M) 75 10.4 x 100l x 80l 100 20 (M) 30 (M) 80 x 105l x 85l 105 25 (M) 35 (M) 85 x 110l x 90l 110 30 (M) 40 (M) 90 16 x 115l x 95l 115 35 (M) 45 (M) 95 x 120l x 100l 120 40

High Power Cylinder Series RHC

40 37 80 65 0.074 0 250 to 1000 16 110 80 10 13 95 20 25 63 30 90 116 40 37 100 80 0.074 Bore size (mm) ZZ Y 6.8 to 11.3 WH 335 X 10 P 30 S 1/2 NF 215 NE 24 ND 25 MM 27.7 M M18 x 1.5 LZ 7.5 LX 73 LY 53 LT 88.5 LS 10 LH 275 52 50 342 10 37 1/2 215 24 24.5 27.7 M18 x 1.5 7.5 80 60 95 10 289 55 63 371 8.5 to 13.5 13 40 3/4 228 32 30.5 37 M22 x 1.5 10 100 75 115 12 308 65 80 391 13 47 3/4 236

CG1

JIS symbol Double acting Minimum Strokes for Auto Switch Mounting Stroke Long stroke (2) (mm) Max stroke (mm) Number of switches Bore size (mm) Standard stroke (1) (mm) Auto switch model 2 1 D-C7/C8 D-B5/B6 D-H7 D-G5/K5 25, 50, 75, 100, 125, 150, 200 201 to 350 20 15mm 10mm 301 to 400 25 301 to 450 32 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 15mm 1500 301 to 800 40 D-B59W 301 to 1200

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

3

75 85 95 85 95 105 125 80 90 100 120 90 100 110 130 95 105 115 135 CKQ 8 8 Arm Proper Tightening Torque 9 Bore size (mm) Proper tightening torque (Nm) 12 16 20, 25 32, 40 50, 63 0.5 to 0.7 2.8 to 3.5 11.5 to 14.0 24 to 30 75 to 90 8 9.5 Fig. 1 Flange Mounting 11 Caution The mounting bolt for the rod flange or head flange should be tightened to the torque shown in the table below. 10.5 Bore