100

(Representative value) ZL3H (04P) ZL3M (04P) Supply pressure: 0.5 MPa Supply pressure: 0.35 MPa 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series

JXCx-OMT0061CN

() 2 () * ) () 3 11.1 12 64 ()() No. 1 2 mm 2 2 mm/s mm mm/s mm/s % % mm mm mm/s % 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 47 - () TB No. No. 063 No.

Hygienic Design Cylinder Series HY

175L HY-M4 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M5 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L 65 70 75 80 85 90 95 100 105 110 65 70 75 80 85 90 95 100 105 110 75 80 85 90 95 100

Electric Actuator Miniature Rod Type Miniature Slide table Type

%] Duty ratio (%) Pushing time (minute) 70 or less 100 LEPY10 LEPS10 Compact 80 70 10 100 50 5 7.4 Precaution on maintenance Caution 1.

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Environment

39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

Vacuum Ejector Series ZM

0.1 0 70 50 60 30 40 20 10 Flow rate l/min (ANR) Supply pressure MPa Exhaust Characteristics/Flow Characteristics, Standard Supply Pressure: S 0.45 MPa ZMA13S Exhaust Characteristics Flow Characteristics 90 180 90 80 160 80 Vacuum pressure 70 140 70 Suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure kPa Vacuum pressure kPa 60 120 60 Air consumption 50 100

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

CG1

62 f 16 17 17 17 17 18 10 7 h 55 62 62 70 78 78 80 80 IJ 27 32 38 48 59 72 59 71 JH (14.5) (17.5) (19.5) (22.5) (25) (25) 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 20 25 32 40 50 63 80 100 Bore (mm) S ZZ 70 70 72 80 95 95 140 150 152 180 211 211 20 25 32 40 50 63 0.25 stroke The minimum stroke for rod boot equipped style is 20mm.

Compact Cylinder/Guide Rod Type Series CQM

25 30 35 40 45 50 75 -100 CQMB6310 15 20 25 30 35 40 45 50 75 -100 CQMB8010 15 20 25 30 35 40 45 50 75 -100 CQMB10010 15 20 25 30 35 40 45 50 75 -100 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 M8 x 50L x 55L x 60L x

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Cylinder with Lock Series CLS

0.1 0.3 100 0.1 0.3 126 0.1 0.3 Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 125 140 160 180 200 250 25 +0.084 0 28 +0.084 0 32 +0.1 0 40 +0.1 0 40 +0.1 0 50 +0.1 0 8 46 M30 x 1.5 100 27 42 CLM2 8 48 M30 x 1.5 105 30 47 U1 L1 8 55 M36 x 1.5 110 34 46 CLG1 8 70 M40 x 1.5 125 42.5 54 RR1 8 70 M45 x 1.5 125 42.5 54 CL1 9 86 M56 x 2 160 53 81 Knuckle pins and cotter pins are included.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

2–4

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

st 200 st 100 st 100 st 75 st 75 st 0 0 0 0 0 0 10 20 30 40 50 Allowable end load F (N) 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 3 (Slide bearing type) 2.5 800 st Deflection Y (mm) 2 700 st 600 st 1.5 500 st 1 300 st 400 st st: Stroke (mm) 0.5 100 st 200 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 4 (

MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

IDU/IDF

B C D E F IDF1D-1 to 11C-1 IDU3D-1 to 11C-1 200, 220 230, 240VAC (50Hz) 200 to 260VAC (60Hz) IN PUT VOLUTAGE SELECTOR 100VAC (50Hz) 100 to 110VAC (60Hz) Single phase Single turn IDF-TR500-2 500VA 118 140 163 70 112 6 5.5 x 10 (Long hole) E D 4-F IDF15C-1 IDU15C-1 Input cord 2m IDF-TR1000-2 1kVA 118 140 208 70 157 10 IDF-TR -3, 4 C VOLUTAGE SELECTOR Dryer Weight (kg) Part No.

JXCx-OMT0023

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 21 11.

Large Size Vacuum Module: Series ZR

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.