Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

Refrigerated Air Dryer

IDF-BP303 IDF-BP311 IDF4E IDF4E 531 560 595 110 2.3 595 110 2.4 175 175 1/2 1/2 I D F I D F IDF6E IDF6E 555 587 617 617 IDF-BP304 IDF-BP312 IDF8E IDF8E 129 3.3 129 3.4 187 182 3/4 3/4 627 659 647 647 31 31 IDF11E IDF11E IDU-BP305 IDU-BP306 IDU-BP307 IDU-BP313 IDU-BP314 IDU-BP315 506 530 572 572 100 1.6 100 1.7 202 192 IDU3E IDU3E 3/8 3/8 I D U I D U 603 632 625 625 110 2.3 110 2.4 175 175

EX120/121/122

(Compactness: volume ratio more than 60%) 60.8 31 70 64 30 19.6 Conventional model (Series EX120) Series EX510 Can flexibly change to Field Bus. Feature In the past, all the part numbers of slave units were needed to be changed by returning it to the manufacturer and reordering (re-estimate, delivery time) it.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ041 P.1.10-34 P.1.10-28 Body Ported 4.5 (0.25) 4.5 (0.25) VQ140 VQ1000 Series Single, 3 position only Latching 6.3 (0.35) 6.3 (0.35) VQ141 P.1.10-34 P.1.10-28 14.6 (0.81) VQ240 VQ2000 Series Single, 3 position only Latching 16.2 (0.9) VQ241 P.1.10-34 P.1.10-28 Metal seal 3.6 (0.2) 3.6 (0.2) VQ170 VQ1000 Series Single, 3 position only Latching 5.4 (0.28) 5.4 (0.28) VQ171 P.1.10-72 P.1.10-70

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

200 210.5 16 177.5 185.5 212.5 223 17 188 196 225 235.5 10 114.5 122.5 150 160.5 11 125 133 162.5 173 12 135.5 143.5 175 185.5 13 146 154 175 185.5 14 156.5 164.5 187.5 198 7 83 91 112.5 123 8 93.5 101.5 125 135.5 9 104 112 137.5 148 3 41 49 75 85.5 4 51.5 59.5 87.5 98 5 62 70 100 110.5 6 72.5 80.5 100 110.5 L1 L2 L3 L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

SV 44 185 24.5 24.5 181 175 EB EA B RATE 165 MODEL SV (SI No.EX124U-SMJ1) LERR.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1.75 depth 14 98 117 142 172 17 19.5 22.5 28 13 14 18 18 13.5 14.5 15.5 16 12 12 12 12 1 8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.

Rotary Actuator/Vane Type

Size: 20, 30, 40 Shaft-end shape of size 40 CRB2 CRB2 Y1 X 1.5 2 K CRB1 2 x Q2 Y1 X Plate 4 0 0.030 MSU Chamfer (Rotation range is stated on page 70.) Chamfer (Rotation range is stated on page 70.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1.75 depth 14 98 117 142 172 17 19.5 22.5 28 13 14 18 18 13.5 14.5 15.5 16 12 12 12 12 1 8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.

PROFIBUS DP Compatible Fieldbus System

Accessory: waterproof cap (for M12 connector socket) EX9-AWTS (2 pcs.) -40No.EX##-OMO0019 Dimensions When only input blocks for M8 connector are connected Stations 1 2 3 4 5 6 7 8 L1 [mm]: Rail length 98 110.5 123 135.5 148 160.5 173 185.5 L2 [mm]: Mounting pitch 87.5 100 112.5 125 137.5 150 162.5 175 L3 [mm]: Manifold length 74 86 98 110 122 134 146 158 L4 [mm] 12 12 12.5 12.5 13 13 13.5

I

E U N I T T Y P E D I M E N S I O N S S I N G L E U N I T: DIN R A I L M O U N T No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 105 140 175 210 245 L3 140 175 210 245 280 No. of Sensors 2 3 4 5 6 L1 70 105 140 175 210 L2 36 71 106 141 Courtesy of Steven Engineering, Inc. !

VZ5000

Platinum silver q Description Sub-plate Aluminum die-casted DXT199-7-1P DXT199-7-2P Rc 1 8 Rc 1 4 Piston plate Body u Resin r Aluminum, HNBR Black w e DXT170-CSolenoid assembly Epoxy/Stainless steel i Piston Spool valve Common with Series VZ 000 1 3 Thread type Nil: Rc F: G N: NPT T: NPTF Resin o O-ring NBR 13 x 11 x 1 Black painted t Resin End cover y Stainless steel Spool spring 3-3-70

Air Slide Table Series MXS

35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 KA 162 218 258 NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 Z 90.5 ZZ 108 108 108 118 131 172 213 271 311 FF 40 40 40 50 35 60 70 75 80 Model MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5

Hydraulic

CHKGB Bore size Rod end thread type Auto switch Quantity XC63 Stroke Intermediate stroke Applicable tube For 75mm stroke For 100mm stroke Strokes 55, 60, 65, 70 80, 85, 90, 95 Dimensions CHKGB--XC63 B A 55, 60, 65, 70 80, 85, 90, 95 Stroke Bore size (mm) A B A B 32 141 131 40 150 140 175 165 50 156 145 181 170 63 165 152 190 177 80 180 163 205 188 100 207 181 232 206 Note) Dimensions other

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

MXS

Model F 50 50 50 60 35 60 70 75 80 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60

MNB

1/4 150 81 22 55 25 100 to 1000 40 41 16 114 189 89 30 20 19 37.5 26 116 20 17 177 37 1/4 170 96 26 Bore size (mm) LD T N P S V LH LS LT LX LY LZ K MM Q H VA W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70

Table of Contents

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

75 80 ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6

SMC

75 80 ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5 296.5 336.5 M 92 92 92 102 115 156 197 255 295 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4