0.4

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 16 for power consumption of AC type.

SX

212.5 108 118.5 129 139.5 150 160.5 171 181.5 192 13.5 14.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 Manual override (Press and turn for the locking type.)

AC Servo Motor Driver (CC-Link Type ）

Igm: Leakage current of the servo motor (Found from Table 13.4.) 120 120 100 100 Leakage current Leakage current 80 80 60 60 40 40 [mA] [mA] 20 20 0 2 0 14 100 5.5 38 2 3.5 8 1422 38 80 150 5.5 30 60 100 3.5 8 22 60 150 30 80 Cable size[mm2] Cable size[mm2] a. 200V class b. 400V class Fig. 13.4 Leakage current example (lg1, lg2) for CV cable run in metal conduit 13 26 13.

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

CR-50500 Okaya Electric Industries) Rated C R voltage [ 30%] Test voltage Dimensions [Unit: mm] [F 20%] AC [V] Between terminals: 625 V AC, 50 Hz/60 Hz 60 s Between terminal and case: 2000 V AC 50/60 Hz 60 s Band (clear) AWG 18 Twisted wire (18.5 + 2) 1 15 1 Soldered 250 0.5 50 (1/2W) 3.6 CR-50500 6 1 6 1 300 min. 300 min. 48 1.5 16 1 (18.5 + 5) max.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 9 Other VFS VFR 4 5 6 VQ7 7 Option Body Option Pilot type 0 1 Standard Direct manual override Nil R Internal pilot External pilot Option Option How to Order Pilot Valve Assembly SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60

Air Slide Table

175 J 56 56 56 66 90 100 150 205 230 I 16 16 16 16 16 31 20 18 18 NN 2 2 2 2 2 3 4 4 4 H 55 55 55 65 80 44 66 66 G 23 23 23 23 32 44 31 56 N 4 4 4 4 4 6 8 8 8 HA 55 55 55 65 80 65 88 132 132 Model F 55 46 55 65 75 60 48 60 65 GA 23 23 23 23 32 72 88 97 122 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 MXQR2510 MXQR2520 MXQR2530 MXQR2540 MXQR2550 MXQR2575 MXQR25-100 MXQR25-125 MXQR25-150 Note) Note

SZ3000

150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 2 148 137.5 118.5 15 3 160.5 150 129 16 4 173 162.5 139.5 17 5 185.5 175 150 18 6 185.5 175 160.5 12.5 7 198 187.5 171 13.5 8 210.5 200 181.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 26 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Serial Transmission Type SS5Z3-60S DB Stations Scale: 37% [With external pilot] 2-One-touch fitting (X,PE ports

e

2-5H7 depth 5 (96.7) (49.6) 60 132.2 100 110.8 35.5 (60) 94 96.7 35.5 D-m D-m 71.5 43.5 Motor 60 102 60 42 E-MY E-MY (60) 60 128 7.5 8.2 60 60 5.5 2 x 9.5 counterbore depth 5.4 7.5 50 5 71.7 17.5 7.1 (Max. 10.1) 4 x M5 x 0.8 depth 9 37 6 9.5 5H7 Long hole depth 5 T-slot section for mounting 6 198 + Stroke 2 x 2 x 5.5 through hole Encoder cable on actuator side (4 wires) Noise filter Note

REA/REB

Speed 600 mm/s 0.01 0.01 20 40 0 60 20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) Vertical Operation Intermediate Stops The cushion effect (smooth start-up, soft stop) exists only before the stroke end in the stroke ranges indicated in the table below.

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

5 Port Solenoid Valve Series VQZ1000/2000/3000

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note) For sub-plate part no., refer to page 967.

LEC-OM02704CN

-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111DH121 m FVD14-8 DH-112DH122 YF-1E-4 YNE-38 n FVD22-8 DH-113DH123 (1)p R38-8 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 q FVD2-6 YNT-1614 1. 2. 13 16 13 (2) 13.3 1 (2) (1) [mm] [m] [/mm] [/km] d[mm] (3) VSVP 7/0.26( AWG#22)-3P-16823

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

MVGQ

Nil: Non-locking push type Manual override Body option B: Locking type B (Slotted) 0: Pilot valve individual exhaust type Manual override Manual override Rated voltage 1 2 3 4 5 6 7 9 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other C: Locking type C (Manual) R port P/E port Manual override Light/Surge voltage suppressor

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Compact Manifold Regulator Series ARM5

80 100 0 50 100 150 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow

33

capacity 1900/2200 W (50/60 Hz) Symbol Option Nil None T High pressure pump mounted Note) HRS 090 HRS 100/150 Note) The cooling capacity will decrease by about 100 W from the value in the catalog.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Switch (When equipped with switch) Internal Pilot Manifold L Dimension n: Stations External Pilot Manifold L Dimension n: Stations L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5 15 3 160.5 150 129 16 5 185.5