Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

MXQ

30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-10 0.02 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25

IDG

IDG50HV IDG60HV IDG75HV IDG100HV 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LV IDG50LV IDG60LV IDG75LV IDG100LV 75 110 170 240 300 IDG60SV IDG75SV IDG100SV 50 100 150 Note) Standard dew point : Outlet air atmospheric pressure dew point under standard performance conditions Standard purge rate : Ratio of purge air flow rate to inlet air flow rate under standard

7.5

Switch (When equipped with switch) 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 L1 L2 L3 L4 210.5 223 235.5 235.5 248 248 260.5 198 210.5 160.5 173 173 185.5 198 148 160.5 200 212.5 225 225 237.5 237.5 250 187.5 200 162.5 175 187.5 137.5 150 150 162.5 186.2 193.7 201.2 208.7 216.2 223.7 231.2 148.7 156.2 163.7 171.2 178.7 126.2 133.7 141.2 118.7 14.5 17 13.5 16 12

0.4

150 162.5 175 187.5 200 212.5 225 237.5 250 262.5 275 287.5 300 300 312.5 325 337.5 350 362.5 375 123 135.5 148 160.5 160.5 173 185.5 198 210.5 223 235.5 248 260.5 273 285.5 298 310.5 310.5 323 335.5 348 360.5 373 385.5 14 Series SQ1000 Kit (PC Wiring System Compatible Flat Ribbon Cable Kit) J Manifold Specifications Compatible with PC wiring system.

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 Protection Circuit Item Unit Standard value Influence HRSH 090 Corrosion Scale generation Caution pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v HRSH If operating in the below conditions, the protection circuit will activate and an operation

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Servo motor Graph of overload protection characteristics LE-T5 T6 Characteristics a T7 T8 T9 Characteristics b The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 350 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%

REA/REB

, 200, 300 500 10 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600 1000 20 200, 300, 400, 500, 600, 800 25 1200 25 2 axes 200, 300, 400, 500, 600, 800, 1000 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

Step Motor Driver （ Pulse input type ）

ORIG SW Dir 0 0 Undefined parameter21 0 0 105 - LEPS Step data default Model LEPS6 LEPS10 Lead [mm] 4 8 5 10 No. 0 0 Movement MOD ABS ABS Speed 150 300* 200 350* Position 0.00 0.00 Acceleration 3000 3000 Step data default Deceleration 3000 3000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 10 20 10 20 Moving force 150 150 Area1 0.00 0.00 Area2 0.00 0.00 In position

Thermo-con

capacity (W) Ambient temperature: 68F (20C) Ambient temperature: 95F (35C) 600 1200 Ambient temperature: 86F (30C) 500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity

Compressed Air Cleaning Filter Series

(6B) C 300(12B) 760 D 795 150 E 300 270 F 520 1033 G 1318 3 H 3 887 J 620 AMD801/811 AMD91 972 AMD800/810/90/100 ORIENTATION IN OUT 3 x H holes IN OUT Label Drain (mm) Model 500 A 300 B 200(8B) C 300 D 1300 E 1430 F 1520 G 20 H Connection (Flange) 50(2B), 80(3B)JIS 10K FF flange 50(2B), 80(3B), 100(4B)JIS 10K FF flange 100(4B), 150(6B)JIS 10K FF flange 870 M20 x l500 AMD100 720 M16 x l400

Booster Regulator/Air Tank

port 1/8 IN port 1/2 221 62 62.8 8 OUT port 1/2 Silencer (Option) 22 32 EXH port 1/2 96 4 x 12 130 3.2 116 150 (When silencer installed: 200) (When high-noise reduction silencer installed: 230) For detailed dimensions, specifications and lead times, please contact SMC.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

17.7 17.8 17.9 18.0 19.5 19.7 19.8 19.9 20.0 24.5 24.7 24.8 24.9 25.0 Symbol 175 177 178 179 180 195 197 198 199 200 245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300 Guide pin diameter 1268 Pin Clamp Cylinder Series CKQ D/CLKQ D G P G P Table 2.

AC Servo Motor Driver (CC-Link Type ）

When you carry out adhesion mounting of the driver, make circumference temperature into 0 to 45 (32 to 113 ), or use it at 75% or smaller effective load ratio. 1000 1000 During operation During operation 100 100 Operation time[s] Operation time[s] During servo lock During servo lock 10 10 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 (Note) Load ratio [%] (Note) Load ratio

Step Motor Controller

VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

Series AK1000

300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222