RQ

, 25 32, 40 50, 63 80, 100 15, 20, 25, 30, 40, 50 20, 25, 30, 40, 50, 75, 100 30, 40, 50, 75, 100 40, 50, 75, 100 RQ MU DManufacture of Intermediate Stroke -X Description Part no.

RHC

LT CC JC Y X JC Y X S + Stroke NF LX LZ RB LS + Stroke ZZ + Stroke J DH1 50 0.042 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E Bore size (mm) Stroke range (mm) 50 Eff. thread length 32 -X Up to 1200 35 0 63 11 72 75 7 11 80 16 23 58 20 60 Up to 1200 80 35 32 55 0.074 0 2080 13 89 78 10 13 90 20 23 61 25 75 Up to 1400 95 40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

IIIIIII

F . 2 20 lbs. (1 ks.)

Mechanical Valves Series NVM, NVFM, NVZNI

F . 2 20 lbs. (1 ks.)

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

AC Servo Motor Driver (Pulse input type/Positioning type ）

B1 AWG 20 B2 Note.

Brake mechanism added

Same surface) 20 100 75 100 80 100 90 100 2 D-A3C D-G39C D-K39C 20 + 35 (n 2) (n = 2, 3, 4, ) 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Different surfaces) 2 n 100 + 100 (n 2) (n = 2, 3, 4, 5) 100 + 100 (n 2) (n = 2, 4, 6, 8, ) Note 1) (Same surface) 1 10 75 80 90 (Different surfaces) (Same surface) 20

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

20 stations (Max.)

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Clamp Cylinder with Lock

20 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Slider Type Ball Screw Drive/11-LEFS Series

Horizontal Vertical LC3F2 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% Duty ratio: 100% 12500 12500 10 10 7500 7500 5000 5000 2500 2500 0 0 0 10 20 30 40 0 5 10 15 20 Work load [kg] Work load [kg] 49 LEFS Series AC Servo Motor Clean Room Specication Work LoadAcceleration

LJ1H

1 Single Axis Electric Actuator High Rigidity Direct Acting Guide Series LJ1H Series LJ1H LJ1 LG1 LC1 LX LC6D/LC6C Switches Lead screw lead mm Mounting orientation Series Page Model Motor type Guide type Ground ball screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M14 x 1.5 30 17 66 50 11 52 176 10 53 88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19 M12 x 1.75 27 14 34 35 34 100

Programless controller Step motor (servo 24 VDC)

Refer to the table below for the speed and the acceleration LEP6J LEP6K LEP10 (L)J LEP10 (L)K Speed [mm/s] Acceleration Speed Acceleration Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] [mm/s2] [mm/s] [mm/s2] 0 20 200 10 200 20 200 10 200 1 30 300 15 300 30 300 15 300 2 40 400 20 400 40 400 20 400 3 50 500 30 500 50 500 30 500 4 60 600 40 600 75 600 40 600 5 70 700 50

Cylinder with Lock Series MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

smcmaintenancepartslist

75, 100 Fiber 65 x L250 1, 5, 10, 20 5, 10, 20, 40 74, 105 65 x L250 Micromesh Refer to pages 256 and 257 for the replacement element type.

Low Profile Slide Table Series MXF

Number of auto switches Bore size/ Stroke (mm) Nil S n 2 pcs. 1 pc. n pcs. 8 12 16 20 10, 20, 30 20, 30, 50 30, 50, 75 30, 50, 75, 100 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.)