CV/MVGQ

2, 3, 4 100 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 Different sides CV n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2) n = 2, 4, 6, 8 MVGQ 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides CC 2 Same side 20 + 35 (n 2) n = 2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 +

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-01-A18 75-01-A18 143 198.5 154 209.5 ZPT50HBJ25-01-A18 ZPT80HBJ25-01-A18 75.5 131 88.5 144 50-01-A18 50-01-A18 110.5 166 123.5 179 50 52 36 54 24 35.5 16.5 80 83 58 85 37 48.5 27.5 75-01-A18 75-01-A18 146.5 202 159.5 215 100 125 ZPT HBJ-B01-A22 (Male thread) 1/8 (Rc, NPT, NPTF) Hexagon width across flats 17 M22 x 1.5 Hexagon width across flats 30 8 50 8 Width across flats 19 10 H 70 4 x

Rotary Table/

O-ring Steel balls Size: 70 to 200 only Shock absorber Replacement parts Description Kit no.

/

External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

Modular Type Filter Regulator Series AW

70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model Port

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

8 @4 CS type snap ring Parallel pin Parallel key Seal washer Plug O-ring Steel balls Shock absorber @5 Size: 10 to 50 Size: 70 to 200 Carbon steel @6 NBR Brass NBR Stainless steel @7 @8 @9 #0 #1 Size: 70 to 200 only Size: 70 to 200 only Replacement Parts Description Kit no. Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

Electric Grippers

Basic Compact LEHZ10 LEHZ10L 100 100 80 80 Overhang H [mm] Overhang H [mm] 60 60 70%, 40% 40% Pushing force 100% 40 40 70% Pushing force 100% 20 20 0 0 20 40 60 80 100 0 0 20 40 60 100 80 Gripping point L [mm] Gripping point L [mm] LEHZ16 LEHZ16L 140 140 120 120 Overhang H [mm] Overhang H [mm] 100 100 Pushing force 100%, 70%, 40% 70%, 40% 80 80 Pushing force 100% 60 60 40 40 20 20 0 0 20

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 60 70 D-Z7/Z80 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 70 65 D-Y7W D-Y7WV 2 pcs. (Different surfaces) 25 20 1 pc. 25 20 2 pcs. (Same surface) 70 75 D-Y7BAL 2 pcs.

4/5 Port Solenoid Valve

119 77 3 position 58 81 53 71 54 73 75 115 Body ported Base mounted 0.39 0.18 0.69 0.44 0.39 0.12 2 position C4 0.69 0.56 0.57[0.41] 0.40 0.40 0.4[0.37] 0.19 0.15 0.43 0.41[0.41] 0.41 0.40 0.12 M5 x 0.8 10-SYJ523--C4 (One-touch 72 126 82 84 fitting for 4) 0.37[0.37] 0.37 0.10[0.11] 0.10 3 position 0.15[0.10] 58 81 75 115 53 71 54 73 0.36 0.19 0.40 0.12 0.70 0.47 2 position C6 0.37 0.54 0.19

ITV

100 0 25 50 75 100 Input signal [% F.S.]

C85

4 10 20 6 40 75(80) 30 70(75) 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 12 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 16 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 20 32 8 66 103 50 96 19 6.6 25 5 40 20 6.6 19 42 66 54 36 17 46 8 5 40 6 25 32 8 66 110 50 99 23 6.6 25 5 40 24 6.6 23 42 66 54 40 17 46 8

C85

{81} 30 70{76} 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 10 20 6 40 75(80) 30 70(75) 12.8 4.5 16 3.2 22 13 4.5 12.8 26 38 35 23.8 11 26 5 3.2 25 4 12 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 16 25 8 52 88(90) 40 80(82) 18 5.5 20 4 30 18 5.5 18 33 58 42 32 14 38 6 4 32 6 20 32 8 66 103 50 96 19 6.6 25 5 40 20 6.6 19 42 66 54 36 17 46

ZP

Thin Flat/Thin Flat with Ribs Deep A B Y Model Model A B C D E F Y G H G H I: M5 x 0.8 I: M6 x 1 ZPR10UT 10 11 1 ZPR10D 10 16 12 18 16 25 33.9 50 71 76 7 15 24 32.9 49 20 25 70 75 6 ZPR16D ZPR13UT 13 14 1.5 ZPR16UT 16 17 Applicable Tubing ZPR10CT 10 11 0.8 Applicable tubing O.D.

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

90

100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 150 100 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 80 120 105 Vacuum pressure 60 0 15 30 45 60 75 90 40 Suction flow (Port exhaust) Suction flow (Silencer exhaust) 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 100 Suction flow [L/min (ANR)] 6 Series ZK2 Vacuum Pump System Flow-rate Characteristics

•

(mm ) . 100 125 150 I 50 75 100 125 150 75 ~ 50 I 75 50 100 125 150 107 40 70 B3 83 97 11 5 128 128 194 52 62 204 212 225 225 1 83 107 50 70 83 ! 97 115 128 I 128 52 62 204 19' 212 2.?

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Air Cylinder

126 138 SA Z ZA 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st Bore size D6 34.5 (39.5) 43.5 (48.5) 47.5 (52.5) 61.5 (66.5) 65 (70) 74 (79