HRS100/150

HRS HRS 090 HRS 100/150 HRS 100/150 Part no.

CL

120 to 160, refer to Best Pneumatics Vol. 6.

Electric Rotary Table

Load A Displacement LER50 LER10 LER50 (Basic type) LER10 (Basic type) 200 Displacement (m) Displacement (m) 400 150 350 120 10 20 30 40 LERH50 (High precision type) 50 LERH10 (High precision type) 0 20 40 60 80 100 120 0 5 10 15 20 25 30 Load (N) Load (N) LER30 300 LER30 (Basic type) 250 Displacement (m) 200 50 130 150 LERH30 (High precision type) 0 10 20 30 40 50 60 70 Load (N) Deflection

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

) 108 (120) 130 (144) 133 (147) 104 (113) 120 (132) 120 (132) 20 25 32 40 50 63 80 100 725 Air Cylinder CG1-Z 2122CG1-Z/ 1011Axial Foot (L): CG1L, CG1L 10112122With rubber bumper Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

MTS

W (kg) 40 32 32 1 1 25 20 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 16 16 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 25 20 20 0.1 0 40 60

Table of Contents

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

CXSW20-175 CXSW20-200 120 178 60 10 130 20 198 70 Standard stroke Long stroke (-XB11) 2-5.7 140 218 30 80 44.5 44.5 150 238 90 40 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20

Refrigerated Air Dryers

75 IDU-FL211 IDU11E 375 265 75 360 320 90 IDU-FL212 IDU15E1 440 370 120 440 375 120 IDU-FL215 IDU22E 420 315 100 555 415 170 IDU-FL216 IDU37E 550 365 140 580 540 230 IDU-FL217 IDU55E 720 400 175 735 515 265 A filter set for the IDF-FL200 to 214 consists of 1 filter.

AZ1000

MPa) AZ1200 2.12 (53.8) 120 0.83 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or HR) Max. 6.5 (165.1) (When selecting option code FC) 100 0.69 Delivery pressure (psig) 80 0.55 1.5 (38.1) 60 0.41 40 0.28 2.62 (66.5) 20 0.14 0 0.00 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) AZ1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 0.69 (17.5

MXQ

(mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150 MXQ20-100 MXQ20-100 MXQ20-125 MXQ20-125 MXQ20-150 MXQ20-150 0.06 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-150 MXQ20-150 MXQ20-150 0.08 MXQ20-30 MXQ20-30 MXQ20

Metal Seal/Rubber Seal Series VQ Body Ported

170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS] n L 1 137.5 148 2 150 160.5 3 162.5 173 4 175 185.5 5 187.5 198 6 200 210.5 7 200 210.5 8 212.5 223 9 225 235.5

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

L (mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

or less 4.72 (4.55) VFR630 VFR631 0.15 9.3 0.17 9.3 39 39 3 4 42 [40] 0.12 [0.15] 9.6 [9.4] Exhaust center 4.72 (4.55) (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 VFR640 VFR641 1 0.14 8.9 38 3 4 150 or less 0.10 [0.44] 8.7 [5.7] 38 [20] Pressure center 9.3 150 or less 4.72 (4.55) VFR650 VFR651 3 4 Pressure center 1 0.16 40 (B) (A) 4 2 Model Type of actuation Effective area (mm2) Plug-in Non plug-in

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

Air Slide Table Series MXS

200 MXP 200 160 120 80 40 0 0 100 50 150 200 Load (N) Load (N) Load (N) MXY 20 20 20 Lr=122 mm MTS 0.040 0.05 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100

MXS

200 200 0 160 120 80 40 0 100 150 200 Load (N) Load (N) Load (N) CXT 20 20 20 Lr=122mm MX 0.040 0.05 0.10 MXU 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection (mm) Table deflection (mm) Table deflection (mm) MXS 0.025 0.03 0.06 MXS2075

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80

Basic type / Direct mount type Series CY3B/CY3R

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.

Water-cooledThermo-chiller

Page 120 Page 121 Page 121 Page 121 Page 122 Page 122 Page 122 Page 123 to 125 103 Series HRW Model Selection Guide to Model Selection 1.