Air Cylinder

Standard Strokes/ (mm) Air cushion Bore size Standard stroke 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Made to 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Made to Order (For details, refer to pages 25 to 27.)

AC Servo Motor Driver (CC-Link Type)

150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

Industrial Filters

635 870 34 1000 24 326 745 550 300 860 1650 2105 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 630 920 37 750 24 317 795 600 300 880 1410 1865 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 710 970 37 1000 24 394 795 600 300 880 1670 2125 120 250 80 (3B) 100 (4B) 150 (6B) 65 (2 1/2B) 65 (2 1/2B) 735 970 53 750 24 373 845 650 300 890 1420 1880 120 250 80 (3B) 100 (4B

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

ZP

, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber FKM CR N S F C 32 150 250 300 340 Note) Silicone rubber is only applicable to the 32 pad.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180 200 Overhang L (mm

Rotary Cylinder Series MRQ

Symbol -X5 3 Non-standard Angle Adjustment Range MRQ Mounting Stroke Cushion Auto switch Rotating angle S X X5 32 40 Angle adjustment range For rotating angle, fill in either A (90 type) or B (180 type).

MTS

140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm) Overhang

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

%silltr

The size of the stopper delines lhe rotalion angle of 90, 180 or 270'. Adjustable stops may be provided to adjust any angle ot rolation of the unit. ,rOar*$ 180' 900 Fig 6,22 Vane Type Rotary Actuator I Z I N G R O T A R Y A C T U A T O R S orque and Inartia Linear cylinders have a cushion to reduce the impact when lhe piston hits the cover.

MXS

0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection Example Operation conditions 1 Model used Cushion style Work mounting position

HRL

Pressure Sensor for General Fluids PSE56 Pressure Sensor Controller PSE200, 300, 300AC 2-Color Display High-Precision Digital Pressure Switch ISE80 Fittings and Tubing Refer to the Web Catalog for details.

Moisture Control Tube

Fig. 2 Length Selection Chart at Basic Conditions 300 Necessary length to prevent condensation L [mm] Necessary length at basic conditions (lower right of the chart) is approx. 180 mm. 250 O.D. 6 mm tube O.D. 4 mm tube 200 Check the presence of condensation. 1 150 Check the presence of condensation. (1) Calculation method of volume ratio (Kv value) Basic conditions Supply dew point: 20C (

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 BMB2 -032 BMB2 -040 MDB 7-9-41 42 Technical Data 2: How to Mount and Move the Auto Switch Mounting

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Grommet L plug connector MN: Without lead wire WO: Without connector cable G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D, Y: With connector Coil type + + Standard Nil T With power saving circuit (24, 12 VDC only) + + + + + + Power saving circuit is not available for D, Y, DO, YO or W types.

Electric Actuator

700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.