Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

HRX-OM-Q026

HRSH250/300-A HRSH250/300-A Sets threshold detection pressure Series, Other Series, Other for Circulating fluid discharge HRSH100/150/200/250models HRSH100/150/200/250models pressure rise alarm generation.

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.

MXS

70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 NA 2 2 2 2 2 2 4 4 4 KA H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 ZZ 97 97 97 107 122 161 214 268 320 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 M 83 83 83 93 108 147 200 254 306 MXS20

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

Series AP500

0.07 A 0 0.00 0.88 (22.4) 0 50 100 150 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) AP1900HF 600 psig (4.1 MPa) 100 psig (0.69 MPa) Inlet pressure: 300 psig (2.1 MPa) 60 psig (0.41 MPa) 100 0.69 90 0.62 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 70 0.48 Connections inch (mm) A 60 0.41 FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) 50 0.34 3.46 (87.9)

Basic Type/Direct Mount Type

Standard stroke (mm) Max. stroke without switch (mm) Max. stroke with switch (mm) Bore size (mm) Symbol Specifications 300 300 6 50, 100, 150, 200 -X116 -X160 -X322 -X1468 Hydro specifications 500 500 10 50, 100, 150, 200, 250, 300 High speed specifications 50, 100, 150, 200, 250, 300 350, 400, 450, 500 Outside of cylinder tube with hard chrome plating 15 1000 750 Interchangeable specification

CNG

301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x

CNG

301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l ZZ H e f h ZZ 20 25 32 40 M4 x 0.7 depth 7 5 6 M8 x

Cylinder with Lock Series CLS

MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200 200 -X Individual -X 100 100 100 500 400

Electric Actuator

80 90 30 200, 300, (400) 500, 600, (700) 8 40 800, (900) 16 (1000), (1200) Page 9 300, (400), 500 600, (700), 800 10 63 (900), 1000 20 (1200), (1500) Strokes shown in ( ) are produced upon receipt of order.

CNG

7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ

Cylinder with Lock Series CNG

7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ

Slider Type Ball Screw Drive/11-LEFS Series

300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead B Lead B 40 Work load: W [kg] Work load: W [kg] 20 30 Lead A Lead A 20 Lead H 10 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 30 60 Lead B Work load:

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

50.6 [57.6] (Lead wire length) Approx. 300 139.6 [144] 127 [131.4] 120 [124.4] 107.4 [111.8] 159.6 147 70.9 157.8 145.2 137.8 125.2 60 123 110.4 52.6 51.1 [53.3] 60.9 [63.1] 70 M8 x 1 44.1 26.6 53.6 64.9 72.4 Max. 10 Pg7 Note) Refer to page 176 for dimensions of connector types.

7.5

(M3) 30.6 (Lead wire length) 9.9 5.3 Silencer (Air discharge port) 4(A) port side: Blue 2(B) port side: Yellow Approx. 300 (Built-in silencer spec.)

Large Size Vacuum Module: Series ZR

pressure Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) 80 80 80 80 ZY Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 70 70 70 ZF 60 60 60 60 Air consumption 50 50 50 50 ZP Air consumption 40 40 Vacuum pressure 40 40 Suction flow Suction flow SP 30 30 30 30 20 20 20 20 ZCUK 10 10

MG

to 300 st Over 300 st 25 st or less 25 st or less 32 40 50 63 42 M8 x 1.25 16 96 45 4 21 44 4.5 110 3 78 6 98 63 24 48 124 300 171 34 50 M8 x 1.25 16 104 46 4 22 44 4.5 118 3 86 6 106 72 24 48 124 200 300 84 122 172 36 66 M10 x 1.5 20 130 48 5 24 60 6 146 4 110 8 130 92 24 48 124 200 300 86 124 174 38 80 M10 x 1.5 20 130 50 5 24 70 6 158 4 124 8 142 110 28 52 128 200 300 88 124 174 MGPM (