5 Port Solenoid Valve

Symbol Length Nil 3 6 10 150 mm 300 mm 600 mm Part no. 1000 mm S0700-S-M5 Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width

0.4

Single solenoid Lead wire length AXT661-12AL 300 mm 600 mm 1000 mm 2000 mm 3000 mm AXT661-12AL 300 mm 600 mm 1000 mm 2000 mm 3000 mm Socket only (3 pcs.)

Hydraulic

all types 160 94 5 20 79 7.5 Knuckle Material: Carbon steel d (H8) L (F8) Applicable cylinder type Order no.

Booster Regulator/Air Tank

Note) When option G (pressure gauge) is selected Connected to VBA10A, 11A VBAT05S1 Material: Stainless steel 304 Tank IN port Rc 3/8 Booster regulator IN port Rc 1/4 EXH: Rc 1/4 60 (370) (391) OUT (307) Tank OUT port Rc 3/8 257 160 163 32 32 4 x 11 Drain port Rc 1/4 100 160 200 300 Connected to VBA10A, 11A VBAT10S1 Material: Stainless steel 304 Booster regulator IN port Rc 1/4 Tank IN port

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: Air-hydro Type:

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction @8 @0 @4 @2 @3@5@1 @6 @7 Lube, non-lube with auto switch Non-lube type With auto switch @2 @3 @3 @3 #1 180, 200 Steel tube 125 to 160 Aluminum tube Air-hydro @8 @0 @4 @2 @3@5 @6 @7 @3 @3 Aluminum tube Auto switch The numbers

08-cs1w-e

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction @8 @0 @4 @2 @3@5@1 @6 @7 Lube, non-lube with auto switch Non-lube type With auto switch @2 @3 @3 @3 #1 180, 200 Steel tube 125 to 160 Aluminum tube Air-hydro @8 @0 @4 @2 @3@5 @6 @7 @3 @3 Aluminum tube Auto switch The numbers

Air Slide Table Series MXS

MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) D-X Individual -X 57 Series MXS Dimensions: MXS6 Basic style 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 6 J I Max. 10.5 (With stroke adjuster at retraction

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT HF3100A-UN M8 26.5 2-6.5 8 M8 145 1 165 3 M6 380 1 400 5 160 3 TF3005C-TX TX3020C-TX TF3030C-TX [Unit: mm] 3-M4 6-R3.25 length8 M4 M4 M4 3 M4 Approx.12.2 125 2 140 1 155 2 16 16 IN Approx.67.5 3 100 1 100 1 290 2 150 2 308 5 Approx.160 332 5 170 5 12 34 12.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

170.5 181 191.5 202 212.5 223 233.5 244 254.5 265 275.5 286 296.5 83.5 94 104.5 115 125.5 136 146.5 157 167.5 178 188.5 199 209.5 220 230.5 241 251.5 262 272.5 283 293.5 304 314.5 112.5 125 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 287.5 300 312.5 325 325 337.5 123 135.5 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

170.5 181 191.5 202 212.5 223 233.5 244 254.5 265 275.5 286 296.5 83.5 94 104.5 115 125.5 136 146.5 157 167.5 178 188.5 199 209.5 220 230.5 241 251.5 262 272.5 283 293.5 304 314.5 112.5 125 125 137.5 150 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 262.5 275 287.5 300 312.5 325 325 337.5 123 135.5 135.5 148 160.5 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 273 285.5 298 310.5

MY1

400 500 1000 1500 0.05 0.5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 1349 Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1W Series 16, 20, 25, 32, 40, 50, 63 How to Order MY1 M W K 300

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

Square Tube Type Air Cylinder Series MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

SQ1000/2000

External pilot specification Supply/Exhaust block Blanking plate Individual supply spacer Individual exhaust spacer Supply block plate Exhaust block plate Built-in silencer Name plate Port plug Back pressure check valve SQ1000 0.25 0.18 450 600 750 150 300 SQ2000 0.82 0.65 450 600 750 Cylinder speeds marked with a are controlled by a fixed orifice.

MXS

0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection Example Operation conditions 1 Model used Cushion style Work mounting position

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

300 6.8 25 102 3.2 131 400 300 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9