0.4

unit S kit P kit F kit L kit !

4-channel Flow Monitor ( compatible)

7 to 110 100 L Flow gal/min 2.6 to 26.4 1.8 to 29.0 PD 100 to 1000 70 to 1100 Flow L/min 50 to 250 20 to 280 250 L Flow cfm 13 to 66 5 to 74 PD 200 to 1000 80 to 1120 Temperature oC 0 to 100 -10 to 110 50 oC Temperature oF 32 to 212 14 to 230 PD 0 to 1000 -100 to 1100 Flow L/min 0.0 to 10.0 0.0 to 10.5 10 L Flow gal/min 0.000 to 0.353 0.000 to 0.370 PD 0 to 1000 0 to 1050 Flow L/min 0.0

Digital Flow Switch (Integrated display type) ( compatible)

(For the 100 L/min types, the piping length should be 11 cm or longer.)

Series IDG

This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.

PFxx-OMY0005

500] 500 L/min (PF3A801H) [1000] 1000 L/min (PF3A802H) [F 2] Page 44 FLoW [H_2 ] Input of hysteresis [ 50] 50 L/min (PF3A801H) [ 100] 100 L/min (PF3A802H) FLoW [dtH2] ON delay time setting [0.00] 0 second FLoW [dtL2] OFF delay time setting [0.00] 0 second [F 3] FLoW [FiL ] Select digital filter [ 1.0] 1 second Page 45 PrES [0.10] 0.1 second [F 6] PrES [FSC ] Display value fine adjustment

ISO Standard Hydraulic Cylinder

32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

SMC Pneumatic Clean Series

/ CG1F, CG1F 10112122With rubber bumper 4-FD E-0.05 0 FT F FX0.15 (mm) B FT 6 7 7 8 50 63 80 100 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 B 40 44 53 61 E 12 14 18 25 Bore size 20 25 32 40 76 92 104 128 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 Note) End boss is machined on the flange for E.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Actuation type 1 2 Normally closed Normally open AC (50/60 Hz) Bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Bracket is not mounted. Nil : Without bracket F : With bracket 3 port Thread type F Nil Rc For type W, only DC voltage is available. Note) AC-type models that are CE-compliant have DIN terminals only.

Rotary Actuator/Vane Type

MSQ Symbol Mounting B Basic type F* Flange type Symbol Shaft-end shape W Single flat* J** Round shaft MSZ CRQ2X MSQX * F: Except size 40 * A key is used for size 40. ** J is made to order. t Size y Rotating angle u Vane type i Auto switch o Electrical entry/Lead wire length MRQ 10 15 20 30 40 90 90 180 180 270 270 Double vane 90 90 100 100 S Single vane D Double vane Nil Grommet/Lead wire

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

force acts on Section F Displacement of Section A when force acts on Section F Guide central axis (1 axis type) F A F F For the double axis type, this is the cylinder's central axis.

CLS

) Rod end nut 0.23 1.01 0.16 0.56 0.16 0.33 Calculation: (Example) CLSL140-100 Basic weight30.82 (Foot style, 140) Additional weight 1.96/100 stroke Cylinder stroke 100 stroke 30.82 + 1.96 x 100/100 = 32.78 kg Construction Principle Spring force Brake lever Spring locking (Exhaust lock) The brake piston actuated by the force of the spring turns the eccentric cam shaft via the brake lever.

LEC-OM071xx

2 1 to 65535 10 reference units/s2 100 Pn80C Acceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn80D 1st Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80E 2nd Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80F Deceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn827 Linear Deceleration Constant

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Air Cylinder Series CS1

110 150 2 110 + 30(n2) (n = 2, 4, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n

SYJ300/500/700

Bracket AC (50/60 Hz) Nil: Without bracket F: With bracket 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 3 port For type W, DC voltage is only available.

10

17 17 54 G 4 x M6 x 1 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-20DZ 54 58 71 38 82 122 160 32 120 MHL2-20D1Z 96 100 113 80 142 222 260 68 195 MHL2-20D2Z 116 120 133 100 162 262 300 88 235 J dimension is at fully closed.

Modular F.R.L. Units

Cross spacer E F F E E B C A E D E: 4 Rc F: Without thread Model Note) Applicable model Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 D C B A Y24-01-A Y24-02-A Y34-01-A Y34-02-A Y44-02-A Y44-03-A Y54-03-A Y54-04-A AC20-A 40 22 40 40 48 AC25-A, AC30-A 28 43 49 54 AC40-A 36 48 60 Caution on Mounting 62 AC40-06-A 40 62 72 1.

Table of Contents

VQ1000 (VV5Q13)-Plug-in Unit, Flip Type (F, P, J, L, S kit) . VQ0 (VV5Q04)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ1000 (VV5Q14)-Plug Lead Unit, Flip Type (F, P, T, S kit) . VQ2000 (VV5Q24)-Plug Lead Unit, Flip Type (F, P, T, S kit) .

Digital Flow Switch (Integrated display type) ( compatible)

(For the 100 L/min types, the piping length should be 11 cm or longer.)