C76

cushion With Rod Boot (mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150 102 113 151 to 200 115 126 201 to 300 140 151 301 to 400 165 176 401 to 500 190 201 32 40 90 101 12 14 35 46 30 35 10 12 M10 x 1.5 M12 x 1.75 20 24 Item I Wh Bore Stroke 1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125

MB1

1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189

Air Slide Table

F A F Lr 6 6 6 Lr = 40 mm MXQR6-30 0.015 0.03 0.05 MXQR6-10 MXQR6-20 MXQR6-30 MXQR6-50 MXQR6-40 MXQR6-10 MXQR6-20 MXQR6-30 MXQR6-50 MXQR6-40 MXQR6-30 MXQR6-50 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR6-50 0.04 MXQR6-20 0.010 0.02 MXQR6-20 MXQR6-40 0.03 MXQR6-40 0.02 MXQR6-10 0.01 0.005 MXQR6-10 0.01 0 0 10 20 30 40 80 120 0 10 20 30 Load (N) Load (N) Load

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

58

Foot: CS2L S + Stroke H K A AL F With rod boot Port Width across flats KA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM D B E e LH LY 4 x LD f l LX Y N X LS + Stroke N X Y LT ZZ1 + l + Stroke h + l B C ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) C B A AL B D E F G LH LS J V W K KA LD 125 140 160 50 47 Up to 1600 143 115 143 32 71 43 15 85 188 M14 x 1.5 15 17 15 27 19 50 47 Up to

MK

C B A Model MK32-F MK40-F MK -F Model MKG32 MKG40 MKG50 MKG63 RHC 0 0.052 0 0.052 0 0.062 0.1 0.15 5.5 48 65 8 0.1 34 0.15 56 21 M6 x 1.0 5.5 54 72 8 40 62 28 M6 x 1.0 MK(2) 35 50 63 0.1 0.15 6.6 67 89 9 0.1 50 0.15 76 M8 x 1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2

HRX-OM-S004

(with a handle) *2 : Unit : MPa/ C(degree Celsius) Piping thread type Power supply 20 3phase 200VAC(50Hz) Nill Rc 3phase 200 to 230VAC(60Hz) F G (Rc-G thread adapter set is included) 40 3phase 380 to 415VAC(50/60Hz) N NPT (Rc-NPT thread adapter set is included) 46 3phase 380 to 415VAC(50/60Hz) 3phase 460 to 480VAC(60Hz) Fig. 2-1 Product model number HRS Series 2.1Model number of product 2

JXCx-OMU0004

P.65 * ALARM 10 2 e M7 LED f h 3 h 15 7 LED f F g 7 LED f ON(LED a ON 8.1 P.40 10.P.50 25 No.JXC-OMU0004-A (4) 5 AB 2 3 7 LED f (A [1] h ( 3) 7 LED f h h *0F(15) 7 LED f LED a [2]LED a g LED b 7 LED f g 7 LED f g h g g [2]7 LED f C LED b ) g h F15 g 2 (B 26 No.JXC-OMU0004-A [3] i j * i j i j * i j 8.4 P.43 [4] g 1 g [5]7 LED f i 7 LED f j

ZX

unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

QA F Q QB QU QW Bore size (mm) QW QU 29 32 40 50 38 42 50 13 13 16 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 32 to 50 20 (mm) A 59.5 67 68 80.5 82 B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 H 18 22 20 28 28 I 60 69 86 J 4.5 5 7 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O 6.5 depth 4 9 depth 7 9 depth 7 9 depth 7 11 depth 8 P M5 x 0.8 / / / / Q 17 20 20 24.5 24.5 T

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Grippers Modular F.

SMC

25 5H9 depth 5 +0.030 0 N 1 x F 2 51 2-M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 depth 5 +0.030 0 30 1.5 NN-M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5

Air Cylinder Series CS1

FA FD FT FX FY FZ G J K KA M S N MM P l ZZ1 H ZZ d e f h 125 140 160 180 200 250 300 1 2 1 2 3 4 3 4 3 4 50 47 36 90 59 43 14 19 14 16 15 31 30 98 35 82 75 40 145 145 115 190 100 230 110 238 133 261 M14 x 1.5 Up to 1400 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 19 20 16 15 31 24 98 35 82 75 40 160 161 128 212 112 255 110 232 133 255 M14 x 1.5 Up to 1400 M30 x 1.5 0.2 x Stroke

Guide Cylinder Series MGG

) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50 60 70 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 3 (Slide bearing type) 2.5 Deflection Y (mm) 800st 2 700st 600st 1.5 500st 1 300st 400st st: Stroke (mm) 0.5 100st 200st 0 0 20 40 60 80 100

CG1

Additional weight0.09/50 stroke Cylinder stroke100 stroke 0.35+0.09 X 100/50=0.53kg JIS symbol Accessories Stroke Standard stroke (mm) Bore size (mm) Basic Mounting Standard Rod end nut Single knuckle joint 20 25/32 25, 50, 75, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 Option Double knuckle joint (with pins) 25, 50, 75, 100, 125, 150, 200, 250, 300 Order Made Made to order 40/50/63

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32

Table of Contents

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.

CJ2

MM NA NN S T Z Bore size (mm) A GA H FZ FY FX FT FC FB F D 6 15 M3 x 0.5 16 M6 x 1.0 61 (66) 3 117 (122) 10 16 32 14 24 1.6 3 4.5 13 8 14.5 28 12.5 49 8 M4 x 0.7 32 14 24 1.6 4 4.5 13 8 15 28 M8 x 1.0 105 12.5 50 8 M5 x 0.8 42 20 33 2.3 5 5.5 19 8 15 28 M10 x 1.0 106 ( ) in S and Z dimensions: With auto switch With Air Cushion/Dimensions other than the table below are the same as the