Modular Type Regulator Series AR

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Base Mounted Metal Seal/Rubber Seal Series VQ

VQZ VQD Except L kit Except L kit Except L kit P. 2-4-177 P. 2-4-166 For S, G kit, please contact SMC.

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400 500 600 700 Flow rate (l

Check Valve Series AK

ASF Standard size 1 4 1 2 1 2 4 6 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Thread type Nil N F Rc NPT G AK4000-03/-04 AK6000-06/-10 Port size 0.5 MPa 0.5 MPa Port size Applicable series AK2000 AK2000/4000 AK4000 AK4000 AK6000 AK6000 Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa 0.3 MPa 0.3 MPa 0.7 MPa 0.7 MPa 01 02 03 04 06 10 1 8 1 4 3 8 1 2 3 4 1 Flow rate (l/min (ANR)) Flow rate

125

Nil Without sub-plate* Manual override 02 1/4 03 3/8 04 1/2 42 Grommet/ (L/M) plug connector DIN terminal Nil Non-locking push type * With a gasket and 2 mounting bolts Grommet/ (L/M) plug connector Electrical entry B Locking slotted type Grommet L plug connector M plug connector DIN terminal G: Lead wire length 300 mm L: With lead wire (Length: 300 mm) M: With lead wire (Length: 300 mm)

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

IR1000/2000/3000

800 900 1.0 0 100 200 300 400 500 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR2020-02 IR2020-02 IR2020-02 Conditions: Supply pressure 1.0MPa Conditions: Back pressure 1.0MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 MPa Set pressure MPa 0.8 Set pressure MPa 0.6 0.202 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600

Direct Solenoid

Poriing No. of Ports 'xx" M84010-02 Ta"NPTFSide l l M84011-02 7a" NPTF Side: Y.r" Bottom A & B 1 3 MB 4210-02 %"NPTFSid(2); % Botlom(5) 7 t 5 Manifolds *(OptionsT & P Only) Part No. Poding No.of Ports "xx" Subplates .

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

E-P HYREG

VVEX2-2-5-02 VY1200-00-G 4 pcs.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

Clean Regulator

SRH3010-02 SRH3000-02 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 0 2 4 6 0 100 400 200 300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering, Inc

Modular Type Air Filters Series AF

0.04 0.04 0.02 0.02 0.02 0 0 2000 4000 6000 00 00 5000 10 15000 2000 4000 6000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AF60 Rc1 0.10 0.08 Pressure drop (MPa) P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.06 P1 = 0.1 MPa 0.04 0.02 0 0 5000 10 15000 Flow rate (l/min (ANR)) Specific Product Precautions Be sure to read before handling.

LEC-OM02704CN

S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1 2 3 0() 1() 2() 3() PD20 0 S S S