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Dimensions: Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section
axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products
precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates
(n 2) /2 n = 2, 4, 6, 8 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-M9mAV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 15 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-A9m n 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-A9mV n 10 + 30
2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.
OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.
OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.
100 Supply pressure (PSI) Supply pressure (PSI) 50, 60 30 600 23 23 23 23 22 25 Minimum operating pressure (PSI) 20 500 20 17 17 17 Theoretical thrust (Ibf) 63 (2-1/2") 15 400 10 300 5 200 0 6 (1/4") 10 (3/8") 50 (2") 15 (5/8") 20 (3/4") 25 (1") 32 (1-1/2") 40 (1-1/2") 50 (2") 63 (2-1/2") 100 Bore size [mm (inch)] Note) Values show when the cylinder is driving without load. 0 25 50 75 100
Hard chrome plated NA Grease nipple HW (mm) CY1L Bore size (mm) HW NA 15 20 25 32 40 33.0 37.5 38.0 43.0 43.0 43.0 50.0 50.0 61.0 68.0 1538 Made to Order: Individual Specifications CY1L/H Series Symbol -X431 Auto Switch Rails on Both Side Faces (With 2 pcs.) 4 Switch rail CY1L X431 Bore size Magnetic holding force Stroke Auto switch rails on both side faces (With 2 pcs.)
D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14
2 (Different surfaces) 10 n 10 + 30 (n 2) 2 (Same surface) 50 D-A9l 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) 2 (Same surface) 40 D-A9lV 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.
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With air cushion 2 x M5 x 0.8 Relief port RA GA WA RA GA WA Cushion valve (Width across flats WH) Cushion valve (Width across flats WH) 10 10 20 20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19
flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20
K 1,1,1-Trichloroethane Formic acid Trichloroethylene 1,1,2-Trichloroethane Ethyl formate Trichloroacetic acid M 1,2,3-Trichloropropane Propyl formate Toluene 1,2-Dichlorobutane Methyl formate Naphtha H 2,4-Dichlorotoluene Xylene Carbon dioxide 2-chloropropane Glycol Nitrogen dioxide KK 2-nitro-2-methylpropane Glycerine Nitrobenzene 2-nitrobutanol Cresol Nitromethane D Pentabasic benzamide