Compact Manifold Regulator

IN Piping Position 2.

ARM10/11

Handle position 2.

ARM10/11

Handle position 2.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

SJ3A6

2!

Compact manifold regulator ARM5 Series

PBT 2 B Port plug 2 Bonnet PBT, HNBR Refer to page 705.

Vacuum Regulator

P601010-2 P601020-2 Valve assembly 2 HNBR, etc.

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.)

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Unit specifications Input/Output specifications NPN open collector 2 outputs + analog output NPN open collector 2 outputs + auto shift input PNP open collector 2 outputs + analog output PNP open collector 2 outputs + auto shift input With unit switching function Note1) 22 Nil 30* 62* 70* SI units only Note 2) M Note 1) This will no longer be sold for use in Japan after the new Weight and

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Unit specifications Input/Output specifications 22 30 62 70 NPN open collector 2 outputs + analog output NPN open collector 2 outputs + auto shift input PNP open collector 2 outputs + analog output PNP open collector 2 outputs + auto shift input Nil M With unit switching function Note1) SI units only Note 2) Note 1) This will no longer be sold for use in Japan after the new Weight and Measure

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Table of Contents

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

VQ7-6/7-8

Blank plate (filter, regulator) 4 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 2 VQ7-6-FHG-D 4 Use of control units 2 VQ7-6-FG-D 1) The supply pressure (Po) passes through the regulator with filter and is adjusted to the prescribed pressure.