LEC-OM02704CN

2 RXn7 RYn8 RXn8 RYn9 RXn9 RYnA 1 RXnA RYnB 2 RXnB RYnC 3 RXnC RYnD 4 RXnD RYnE 5 RXnE RYnF RX(n1)F RY(n1)F RX(n+2)0 RY(n+2)0 RX(n+2)1 RY(n+2)1 RX(n+2)2 1 RY(n+2)2 RX(n+2)3 2 RY(n+2)3 6 RX(n+2)4 3 RY(n+2)4 7 RX(n+2)5 4 RY(n+2)5 8 RX(n+2)6 5 RY(n+2)6 RX(n+2)7 6 RY(n+2)7 RX(n+2)8 7 RY(n+2)8 RX(n+2)9 8 RY(n+2)9 RX(n+2)A RY(n+2)A RY(n+2)B RX(n+3)9 RY(n2)C 1 RX(n+3)A RY(n2

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JOn-2) With n surface "= 1.2.3,4 , n=2,4,6,8 ... n=2.4.5.e .. 1'1 =2 .4 ,6 ,8 ... switches Same 5.S+~1'l2) 7S+,5O(n-2) ao. 5O(1l-2} 90+50(n-2) ""F ttl surface

0.

A 2 A 2 A 2 A 2 A (8) 1/8 [1(P), 3(R) port] 8 2 x 4.3 (For mounting) L5 6.5 One-touch fitting [2(A) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" 15 M5 x 0.8 [2(A) port] L4 L3 39.5 (Station 1) (Station n) C6: 44.1 N7: 47.9 (3.2) (For M5) 45.2 A A 20 (11) (7.5) 2 2 The dashed lines indicate the DIN rail mounting [-D].

60

0.15 0.3 0.85 0.1 0.3 0.08 0.2 1.2 2.0 0.3 0.85 0.1 0.3 0.08 0.2 VXK2112-01 VXK2122-01 VXK2132-01 VXK2112-02 VXK2122-02 VXK2-02 VXK2322-02 VXK2132-02 VXK2232-02 VXK2332-02 VXK2242-02 VXK2342-02 VXK2-03 VXK2322-03 VXK2232-03 VXK2332-03 VXK2242-03 VXK2342-03 2 3 4.5 2 2 3 4.5 2 0.8 0.45 0.2 0.8 0.45 0.7 1.0 0.2 0.3 0.6 0.15 0.35 0.7 1.0 0.3 0.6 0.15 0.35 0.17 0.33 0.61 0.17 4.1 7.9 15 4.1

HRX-OM-M091

OFF Contact input signal 2 type ALT Contact input signal 2 delay timer (time delay) of reading 0 Contact input signal 2 OFF detection timer 0 2.4 Contact output 1 function RUN Contact output 1 operation A Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

VK300

Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed

Compact Manifold Regulator Series ARM5

O-ring NBR 7 JISB2401 P3 JISB2401 P5 Bracket A 2 Bracket O-ring NBR 8 28 x 25 x 1.5 35 x 31 x 2 2 1 set assembly Bracket B 136312 136412 13 Hex. socket head cap screw 2 How to order (1) When adding n stations to ARM Regulator n pcs.

Intrinsically Safe Valve

2009)(Refer to page 40 for details) How to Order SY 53 20 01 5 1 LL 3 Bracket UL/CSA compliant 5 7 9 Series Nil: Without bracket F1: With foot bracket 53-SY5000 Thread type 53-SY7000 Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 53-SY7000 1/

F

Release Button: Imperial: Red Metric: Blue C O N N E C T I O N T H R E A D C O N F I G U R AT I O N Metric M5 M5 x 0.8 Metric 01 1/8 02 1/4 03 3/8 04 1/2 06 6mm Diffent Dia Reducer 08 8mm Diffent Dia Reducer 10 10mm Diffent Dia.

VZM500

VH Roller lever VZM550-01-01 VZM550-01-01S VHS (Polyacetal or hard steel roller) JIS Symbol (Pilot exhaust port) 0.5 MPa supply 2.2 mm P.T. 8 N F.O.F. 2-3.2 mounting hole 4.0 mm O.T. 6.2 mm T.T.

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

VS 8-2/VS 8-4

IP65 enclosure with use of waterproof circular connector P.3, 21 P.3, 21 M kit SUP port EXH 1, 3 (P, R) 1/2" 3/8" Port size Cylinder port 2, 4 (A, B) 1/4" 3/8" 1/8" 2 Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R [Option] How to Order Manifold 03 SD6Q VV8 01 N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations

3 Port Solenoid Valve Metal Seal Series VZ200 1

DIN terminal 4-15-12 13 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ400 Dimensions: Body Ported Grommet: VZ4 2-G H (S)-01 With foot bracket: VZ4 2--01-F 1 2 1 2 2-3.4 mounting hole 2-4.5 mounting hole M5 x 0.8 Pilot EXH V100 Manual override (Non-locking) SY Manual override (Locking type (Tool required)) Manual override (Locking type (Manual)) SYJ 2-3.4 mounting hole

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

E-P HYREG

VEX1-17 1 pc. 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 Note 1) 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 Piping thread type 2 Common external pilot 8 2 8 stations Nil Rc G Note 2) A B C 3 8 1 4 2 stations 1 F N Internal pilot 0 1 For VY140 4 3 8 NPTF NPT 2 Common external pilot T 6 3 8 1 2 6 stations VY manifold pilot type Body size B, 2 Note 1) In the case

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For manifold type 20, 21R) 1 SYJ5 2 5 M M5 Body ported SYJ5 4 5 M 01 1 Base mounted Thread type Port size Manual override 3 port F Nil Rc Nil: Without sub-plate 01: 1/8 port With sub-plate Nil: Non-locking push type G N T NPT NPTF Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate style, manifold type 40, 40R, 41, 41R Power saving circuit is not

0.4

L7 L6 L5 VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

VZM400

VH Roller lever VZM450-01-01 VZM450-01-01S 14 polyacetal or head steel roller VHS (Pilot exhaust port) JIS Symbol 0.5 MPa supply 2.2 mm P.T. 8 N F.O.F. 4.0 mm O.T. 2-3.5 mounting hole 6.2 mm T.T.