3

Description Material 1 Solenoid coil Cu + Fe + Resin o VXB 2 Coil cover Stainless steel y 3 Tube assembly Stainless steel VXE 4 Return spring Stainless steel u 5 Armature/Piston assembly Stainless steel, FKM VXP 6 Stopper FKM IN OUT 7 Bonnet C37, Stainless steel VXR i 8 Body C37, Stainless steel 9 O-ring FKM VXH VXF Working Principle VX3 De-energized Energized (Pilot valve open) Energized

E-P HYREG

VEX SRH VY1A00 1 , VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply [1(P) to 2(A)] valve of valve y and the exhaust [2(A) to 3(R)] valve close due to the balance between actuating forces F1 and F2.

IZSE_X101

R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual1 Calibration certicate1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter 1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.

ZSE20(F)_ISE20

Nil Without lead wire M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts

ZB-OM00301

Assy Assy Ass y Ass y Assy Assy /PSE /ZISE10 (URL http://www.smcworld.com 41 - No.ZB-OM00301 / UP () 42 - No.ZB-OM00301 ZFAZFBZFC / 10 50 PD PD 43 - No.ZB-OM00301 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com This manual is subject to change without prior notice. 2013 SMC Corporation All

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 2) No malfunction was found after the tests as a result of the test in every direction, X, Y and Z three times while de-energized.

ZSE30/ISE30

OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 3 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value.

ZSE30/ISE30

OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 16-2-6 7 Series ZSE30/ISE30 High Precision, 2-color Display Digital Pressure Switch Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

OFF OFF OFF OFF P1 n1 P2 P1 n2 n1 (Standard: Factory setting) (Reversed) (Standard: Factory setting) (Reversed) Press the SET button to set the mode and proceed to the output type setting. 3 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Pressure setting Auto preset setting Manual setting Press the SET button in the measuring mode to display the set value.

VK3000

Note Bracket VK300-43-2A With screw Body ported VK3120 1 G M5 VK3140 1 G 01 Base mounted Thread type Nil F N T Rc G Valve option Port size NPT Nil Standard For low wattage (2 W DC) 01 Rc (With sub-plate) Nil Without sub-plate 1 8 NPTF Y Option Light/Surge voltage suppressor Nil None S With surge voltage suppressor Z With light/surge voltage suppressor (Type D only) Since the indicator

CRBU

Applicable shaft type: W CRA1 CRQ2 (mm) MSQ L2 Y L2 max Size (mm) E3 = E1 = Y = 10 L1 X L3 max Size 3 to 8 Y 1 5 (8 Y) to (Y 1) MRQ L2 = L4 = 10 15 3 to 14 X 1 3 to 9 Y 1.5 9 (14 X) to (X 1) 6 (9 Y) to (Y 1.5) L1= 15 20 3 to 18 X 1.5 3 to 10 Y 1.5 D10 (18 X) to (X 1.5) 7 (10 Y) to (Y 1.5) L3 = 20 30 3 to 20 X 1.5 5 to 13 Y 2 10 (20 X) to (X 1.5) 8 (13 Y) to (Y

4-channel Flow Monitor ( compatible)

W Line name 9th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 1 R/W Line name 1st letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 2 R/W Line name 2nd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 3 R/W Line name 3rd letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot ON) (0) 4 R/W Line name 4th letter dot Y U8 0x00 0: OFF (dot OFF) 1: ON (dot

Digital Flow Switch (Integrated display type) ( compatible)

0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

Digital Flow Switch (Integrated display type) ( compatible)

U8 0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

Digital Pressure Switch ( compatible)

2nd letter Y U8 0 Refer to Figure "2nd to 4th letter (7seg) of Line name communication data". 0x071E (1822) 0 R/W Line name 3rd letter Y U8 0 Lower level screen 0x071F (1823) 0 R/W Line name 4th letter Y U8 0 0x0720 (1824) 0 R/W Line name Left side bot Y U8 0 0: OFF (dot OFF) 1: ON (dot ON) 0x0721 (1825) 0 R/W Line name Center bot Y U8 0 0x0722 (1826) 0 R/W Line name Right side bot Y U8

42

Note 2) In addition, only DC is available with Y. Note 3) For details about external pilot specifications, refer to page 527.

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r G;-:--t tL , y\a :-/Fr .

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Branch Y' Double branch Different dia. double union'Y' Universal male elkiow Double universal male elbow Uhiversal female elbow Hex. socket head universal elbow Triple universal male elbow Extended male elbow Extended oluo-in elbow Different dia branch "Y' Double branch "Y" Male run tee Double branch universal elbow Branch universalelbow Branch universal female elbow Triple branch universal

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.