Clean Air Module

Switch output Maximum applied voltage 30 VDC (at NPN output) Internal voltage drop NPN output: 1 V or less (at 80 mA), PNP output: 1.5 V or less (at 80 mA) Specifications Output voltage 1 to 5 V Voltage output Allowable load resistance 100 k or more Analog output Output current 4 to 20 mA Current output Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) Status LED's Lights

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

VZ100/300/500

Nil Rc G NPT NPTF 02 2 stations R port 00F 00N 00T 20 20 stations P port R port V100 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

Vacuum Module Series ZX

ZZX102-R ZX1101-K15LZ-EC-X121 934

VQ5000

), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC

Modular F.R.L. Units

1 q r e w t i u y o !0 !

CEx-OMB0060

Command Status Check sum code Reset input Command Block # 0 0 R S [CR] Unit No. Command Check sum code Response Block # 0 0 R S [CR] Unit No. Command Status Check sum code HOLD output release Command Block # 0 0 H R [CR] Unit No. Command Check sum code Response Block # 0 0 H R [CR] Unit No. Command Status Check sum code Test transmission Command Block # 0 0 T S [CR] Unit No.

Digital Flow Switch (Integrated display type) ( compatible)

0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DA H V R T VW PW ! CV !

VQC

Current consumption Note 2) Max. 100 mA Max. 65 mA SQ Input/output specifications Number of inputs 8 4 VQ0 Number of outputs 8 4 24 VDC 10% Valve supply voltage VQ4 Possible supply current Note 3) Max. 240 mA Max. 120 mA VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

Digital Flow Switch

For the analogue output type, 5 V or 20 mA is output when [on], and 1 V or 4 mA is output when [oFF]. Press the button. [F98] Setting of output check completed. Return to function selection mode.

Digital Pressure Switch

24 V: 600 Min. load impedance 50 -S/-R (Auto-shift input mode) With auto-shift switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -X (Copy function switch output) -S/-R (Copy input mode) NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -22No.PS-OMU0009-D -V/-T (Analog output mode) Switch output PNP open

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

Digital Pressure Switch

Connector pin numbers -19No.PS-OMU0003-D Internal circuit and wiring examples Z/ISE20A(F)---Output specification -S/-R (Analog output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analog output 1 to 5 V Output impedance 1 k S: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24

Digital Pressure Switch

Connector pin numbers -20No.PS-OMU0006-D Internal circuit and wiring examples Z/ISE20B(F)---Output specification -S/-R (Analog output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analog output 1 to 5 V Output impedance 1 k S: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24

Vacuum Unit Ejector / Vacuum Pump System

R Supply valve: Self-holding release valve linked, Release valve: N.C.