Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

S Couplers Series KK/KK13

H L (mm) T Connection male thread Weight g Effective area mm L Min. bore A Body size H Width across flats Model L KK3P-01MS R 1/8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37 14 -02MS R 1/4 20.2 34.2 40.2 1/4 25.2 -03MS 9 R 3/8 50.9 32.5 35.7 42.2 17 -04MS R 1/2 57.4 38.2 46.2 22 KK6P-03MS 11 R 3/8 76.0 44.7 41.5 48 19 1/2 -04MS R 1/2 31 53.7 44 52

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

VFR

L R L R Note) L: U side mount R: D side mount EXH block disk When valve exhaust affects the other stations in the circuit, insert EXH block disk in between stations to separate valve exhaust. Body type Plug-in type Non plug-in type AXT625-12A Part no.

3 Port Air Operated Valve Series SYJA300

VG VP L plug connector (L) M plug connector (M) M8 connector (WO) S070 Approx. 300 (Lead wire length) VQ 48.5 [55.5] 33.1 53 VKF M8 x 1 35.5 59.6 [66.6] Approx. 300 (Lead wire length) VQZ 62.8 [65] 53 [55.2] 61.9 VZ 54.5 48 R P R P R P VS Refer to page 4-4-61 for dimensions with connector cable.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D 1 D 2 L 1 L 2 A * M . t W ) f g ( 8 / 1 S 4 3 7 0 L R K 7/ 6 1 ) 1 1 . 1 1 ( 8 6 . 0 ) 2 . 7 1 ( 9 3 . 0 ) 0 1 ( 9 8 . 0 ) 5 . 2 2 ( 3 9 . 0 ) 5 . 3 2 ( 0 1 . 1 ) 8 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 1 1 4 / 1 S 5 3 7 0 L R K 9/ 6 1 ) 9 2 . 4 1 ( 8 0 . 1 ) 5 . 7 2 ( 8 1 . 1 ) 0 3 ( 1 2 4 / 1

15

end position. 863 Motorless Type Electric Actuator/Guide Rod Type LEYG Series Model Selection LEYG SeriessPage 868 Moment Load Graph Selection Conditions Vertical Horizontal L L L m m L Mounting orientation m m Max. speed [mm/s] SpeedVertical Work Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y u, i Graph (Ball bushing bearing type) e, r o, !

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

P R R P R A A A A A 14 19.5 11 10 30.7 31.5 29 52.9 [55.1] 53.7 [55.9] B B B B B M5 x 0.8 (P, R port) 2-3.5 (For mounting) M3 x 0.5 (A, B port) L2 3.5 L1 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + + 42 [49] 26.6 13.5 L plug connector (L) M plug connector (M) M8 connector (W0) (Lead wire length) Approx. 300 42 [49] 26.6 M8 x 1 53.1 [60.1] Approx. 300 (Lead wire length

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

P 1 3 R 1.5 A Rc 1/8 3(R) port Rc 1/4 1(P) port 2-3 die-cast hole For manifold gasket positioning DIN terminal (Y): VQZ32(R)-Y-C6/C8/C10/02 L plug connector (L): VQZ32(R)-L-C6/C8/C10/02 89 300 (Lead wire length) Indicator light 30.5 <35.5> 92.5 Max. 10 Pg.7 Applicable cable O.D. 3.5 to 7 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61 53.5 M plug connector (M): VQZ32(

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

pilot style(R)) VK C6: One-touch fittings for 6 M5: M5 thread VZ VF (C4, C6) (54.5) 16.6 25 10 VFR 30 VP7 (M5) 2.5 20 VP4 33.2 23.2 Mounting holes 10.8 10.8 2-PE port 22.2 Die cast hole For manifold gasket positioning 2 2 VQ 1 5 P 3 (54.5) 2-G(PF)1/16 R port VQ4 Rc(PT)1/8 P port VQZ VQD 0 1 0 1 DIN connector (Y): VQZ222 (R)wYwC4, C6, M5 L plug connector (L): VQZ222 (R)wLwC4, C6, M5 VZS

LX Series Compact Electric Actuators

,.);:-| I Driver unit lt lllnm --i -"r I ' I r_coo-r l]jj ,Tt-r f#posi,ioninsi I | *.!{l ). I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

•

Brown r--= S~ -'-"'h--'~l'n~' ~-: Swnch ~ 2-wire 2-wire ~:::r:m l <::J11--?

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A A1 RR1 A1 E1 L1 MM RR1 U1 NZ L Part no.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Value in the initial state) Base mounted Solenoid Specifications JIS Symbol 5 port 4 port (manifold) Grommet (G), (H), L plug connector (L), M plug connector (M), M8 connector (W) 2 position single 2 position single Electrical entry (B) 2 (A) 4 (B) 2 (A) 4 24, 12, 6, 5, 3 DC Coil rated voltage (V) 100, 110, 200, 220 AC 50/60 Hz 1 (P) 1 (P) 3 (R) 3 (R) 5 (R) Allowable voltage fluctuation

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(P) 3 (R) L plug connector (L) VQZ200 N.C. 3 Port M plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.