Vacuum

05 5 stations Exhaust Adapler/Port size 04 1t2 06 3/4 S-lntegral ZZNr-SA silencer (included) i i l0 -10 stations (Max.) Note: Order proper body types for manifold use (NzMOO3; NZMOO4) (NZMOOS; NzMOO6) Ex6mple (2) 4-stalion eiector manifolds NZZi/04-T04Fi (2). (Manifolds) NZM1O3HT-J5LZ (6) .(stations'l-", NZMo53HT-J5LZ (2) .

Vacuum

05 5 stations Exhaust Adapler/Port size 04 1t2 06 3/4 S-lntegral ZZNr-SA silencer (included) i i l0 -10 stations (Max.) Note: Order proper body types for manifold use (NzMOO3; NZMOO4) (NZMOOS; NzMOO6) Ex6mple (2) 4-stalion eiector manifolds NZZi/04-T04Fi (2). (Manifolds) NZM1O3HT-J5LZ (6) .(stations'l-", NZMo53HT-J5LZ (2) .

E-P HYREG ® Series VY1

04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Example) AS2002FSG-04-X214 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. Indicator direction 10Clean Series Example) 10-AS2002FSG-04 *1 Fluorine grease is used. *2 The cleanliness class (ISO class) is 5.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 R 1/2 12.4 38.5 27.5 28.5 63.8 26.7 1.2 55.8 Reference thread dimensions after installation. 15-9-91

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 27.5 R 1/2 28.5 12.4 38.5 62.9 25.8 1.2 55.8 222 Reference thread dimensions after installation. 751

ASR

Port size 02 03 04 R1/4 R3/8 R1/2 Flow valve: Series ASQ Model Model Applicable tubing O.D.

Hydraulic

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

HRX-OM-W032

Press the 2 sec.

New

04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<

Plug-in/Plug Lead: Single Unit

(For manifold) 0: Plug-in sub-plate 04 Rc 1/2 Porting specifications Note) For thread standard, refer to page 2-6-39.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

13

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

Compact and Lightweight

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Series H, DL, L, LL Self-align Fittings

If using any other type, it may cause the air leakage or tube coming off. 1 2 3 2 1 4 107

4/5 Port Solenoid Valve

SY100-61-3-05 SY100-61-3-06 SY100-61-2-01 SY100-61-2-02 SY100-61-2-03 SY100-61-2-04 Voltage symbol 24V 12V 100V 200V 110V 220V Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC How to use DIN Terminal Caution Connection 1. Loosen the holding screw and pull the connector out of the solenoid valve terminal block. 2.

VQ5000

(For manifold) 0: Plug-in sub-plate 04 Rc 1/2 Porting specifications Note) For thread standard, refer to page 2-6-39.

HRX-OM-M090

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermochiller.