CNA

14 30 27 60 22 96 1/8 1/8 44 10 29.5 16 32 10 85 15 52 16 12 12 10 8 15 to 500 7 M8 X 1.25 18 35 32 70 27 108 1/4 1/8 52 12 38 20 40 10 95 17 56.5 20 13 15 12 11 18 to 600 MXU 7 M10 X 1.25 18 35 32 86 27 115 1/4 1/4 64 16 49 20 40 10 102 17 67 20 18 12 15 11 25 to 600 11 M12 X 1.75 22 40 37 102 32 139 1/4 1/4 78 20 61 25 52 14 123 21 83 20 23 18 17 13 31.5 to 750 MXS 11 M12 X 1.75 26 40

SMC Pneumatic Clean Series

11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

SYJ300/500/700

4 1/8 1/8 1/4 1/4 P, R port 1/8 Port size 1/8 1/8 6 one-touch fitting 1/8 1/8 A port C6 8 one-touch fitting C8 X port Note) M5 x 0.8 M5 x 0.8 M3 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 0.39 0.35

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

NCA1

XA + STROKE P + STROKE Bore S E Y 200 3/4 2-EE (NPTF) A WF 250 3/4 KK C 325 1-1/16 400 1-1/16 AA EA B MM BA AE AT AH D ACROSS FLATS G DD J AL AO S 6 AB (HOLE) LF + STROKE AO AL FA SA + STROKE X119 Option (in) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE FA G J S WF Y P LF SA XA ZA 200 (2) 1 3/4-16 1 1/8 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1.5 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7 7.5 8 O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 UB 6 7.5 10 9 12 VA VB 3 4 4 5 6 WA WB 2 2 2

CY1

8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1R20 11 62 5.6 5 M4 x 0.7 7 95 17 20 40 19 7 22 64 107 38 20.5 CY1R25 15 70 5.6 6 M5 x 0.8 6.5 105 20 22.5 40 21.5 7 28 72 117 43 21.5 CY1R32 13 76 7 7 M6 x 1 8.5 116 26 28 50 27 7 35 79 130 54 24 CY1R40 15 90 7 8 M6 x 1 11 134 34 33 60 32 7 40 93 148 64 26 CY1R50 25 110 8.6 10 M8 x 1.25 15 159 48 42 60 41 10 50 113 176 82 30 CY1R63

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

VQ4000

double check: VQ460 0 1 2 position double: VQ420 3 position closed center: VQ430 3 position exhaust center: VQ440 3 position pressure center: VQ450 0 1 0 1 0 1 0 1 181 108 73 90 50 11 (12.5) 2(B) port 11 (12.5) 4(A) port Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (12.5) 11 (12.5) B A 4(A) port 2(B) port 14 12 1 5 3 4 2 30 45 24.6 A B 2-5.6 Mounting hole Manual

JXCx-OMX0009

E.g.) 1 byte Hexadecimal Binary Decimal (OCT) (HEX) (BIN) 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 0 0 0 0 0 0 1 0 2 2 0 0 0 0 0 0 1 1 3 3 0 0 0 0 0 1 0 0 4 4 0 0 0 0 0 1 0 1 5 5 0 0 0 0 0 1 1 0 6 6 0 0 0 0 0 1 1 1 7 7 0 0 0 0 1 0 0 0 8 8 0 0 0 0 1 0 0 1 9 9 0 0 0 0 1 0 1 0 10 A 0 0 0 0 1 0 1 1 11 B 0 0 0 0 1 1 0 0 12 C 0 0 0 0 1 1 0 1 13 D 0 0 0 0 1 1 1 0 14 E 0 0 0 0 1 1 1 1 15 F 0 0 0 1

Filter Regulator

NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -13- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: Semi-standard: C Piping port Piping port (9) Part No. (9) Part No. thread ty pe thread ty pe Rc Rc AD27-D AD27-C-D G G NPT AD27(-Z)-D NPT AD27-C(Z)-D Appearance and part No.

MG

Symbol Specifications 11 to 249 1 to 249 12, 16 12, 16 -XA Change of rod end shape Applicable stroke (mm) 21 to 399 1 to 399 20, 25, 32 20, 25 -XB6 Heat resistant cylinder (150C) 26 to 399 5 to 395 40 to 100 32 to 100 -XB10 Intermediate stroke (Using exclusive body) Part no.: MGPM20-39 A spacer 1 mm in width is installed in a MGPM20-40. C dimension is 77 mm.

MB

8 1/4 1/4 3/8 3/8 1/2 11 11 11 11 21 21 92 97 106 106 132 132 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 24 24 24 24 40 40 143 152 168 168 208 208 100 110 118 118 150 150 151 165 180 180 226 226 6-6-37 37 Series MBB With Mounting Bracket Foot(L)/Locking at head end (-H) -W -H/ -R (mm) Port Cushion valve Stroke range Bore size (mm) X Y LD LH LS LT LX LY LZ ZZ LS ZZ 32 40 50 63 80 100 to 700 22 9

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.4 1.8 2.5 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.0 1 6.0 1

JXCx-OMU0004

ALARM 0 48 No.JXC-OMU0004-A 9.4 ) 1011 11 10 53 97 (1) NO.10 No.10 (2) NO.11 No.11 No.11 NO.11 (3) (1) 10 11 9 7 (2) 11 9 7 (3) 11 10 5 3 PLC I/O (1)NO.11 1No.11 (2) (3) 2 3 No.11 No.10 [1] OUT13 ONIN013 NO.11 NO.10 ON11 (1) OFF ON IN0 bit_0 [2] BUSY ONOUT13 IN1 ON OFF OFF bit_1 [3] BUSY ONIN013 IN2 ON OFF OFF IN2 [4] ALARM BUSY bit_2 OFF IN3 ON OFF [5] RESET bit

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

SMC Pneumatic Clean Series

8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note) Consult

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A C B A stroke operation 1) Initial state (0 stroke position) B stroke A stroke A C B A stroke 2) Operation When the air pressure is supplied from the A port, the rod operates the A stroke. A C B B stroke operation 1) Initial state (0 stroke position) B stroke A stroke C 2) Operation When the air pressure is supplied from the C port, the rod operates the B stroke.