ZP

2 1.5 2 1.5 8 8 8 3 3 9 8 5.2 2 4 1.8 7 6 3.4 2 2.2 Lateral 4.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

Cylinder with Lock

7 #6 #8 #7#5 #0#1#9 @1@0 @2 @3 @6 @8$0@4@5 @9 t !9 #3#2 #4@7!7!2 Component Parts Component Parts No. Description Material Qty.

SV

Refer to Precautions 2 on page 1-2-9.

HEC_W-E

IN THE EVENT ERR14 ARISES-9-2 FIG. 9-2 ALARM INDICATION IN THE EVENT ERR14 ARISES DURING PB RANGE SETTING INPUT -9-2 FIG. 9-3 ALARM INDICATION IN THE EVENT TEMP.

HRX-OM-W060

fluid return port Rc1/2 2 20 to 25Nm 0.8MPa or more Tank drain port Rc1/2 2 20 to 25Nm 1 When the piping thread type "F (G thread)" or "N (NPT thread)" is selected, it becomes "G thread " or "NPT thread ". 2 When the piping screw type "F (G thread)" or "N (NPT thread)" is selected, a conversion joint is included.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Note 2) Output when the power supply of the driver is ON. (N.C.)

24

9 !9 !4 @7 @9 @9 @9 @8 @8 @6 !2 !1 o i y !6 t r q @5 e r r w @1 !9 u !0 !2 @4 63 or more 16 20 32 @0 @3@2 !5 16 to 25 25 stroke Cushion valve section 16 to 25 50 stroke or more 50 or more Component Parts Component Parts No.

CRBU

2) X = 2030 40 5 to 22 X 2 7 to 15 Y 4.5 12 (22 X) to (X 2) 9 (15 Y) to (Y 4.5) E4 = E2 = Symbol: A15 Applicable to single vane type only Symbol: A14 Applicable to single vane type only A special end is machined onto the short shaft, and a through-hole is drilled into it.

Air Cylinder Series CA2

9 !3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

VQZ1000/2000/3000

51 45 2(B), 2(A) port 22 16 SMC 9 9 9 M5 x 0.8 (Not applicable to standard.)

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

3 4 5 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure center Bracket "YOZ" is not available.

Compressed Air Cleaning Filter Series

1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 3/4, 1 259 7 Water Separator Series AMG Dimensions AMG650 Auto drain D: With auto drain (N.O.) 180 76 12 136 Drain cock: Black 4.5 34 160 10 one-touch fitting

Air Cylinder

5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 2 3 4 AD 24 26 31 37 46 AA 63 66 80 91 108 AC 3 3 3 4 5 K 9 9 10 11 12 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 MRHQ MA DVA 4H9 4H9 5H9 6H9 6H9 Q 11 12 14 17 20 SC 7 7 8 8 8 WB 2 2 2 2.5 3 SB 8 8 9.5 11 11 VB 4 4 5 6 6 O 4.5 4.5 5 5.5 6 SA 4.2 4.2 5.1 6.6 6.6 UB 10 10 12 16 16 R 44 52

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Compact Rotary Actuator Series CRQ2

9 !2 @1 e u o t @2 !8 @0 @0 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 CRA1 y w i !5 q r q w r y !5 !6 i CRQ2 MSQ MSZ CRQ2X MSQX Component Parts Component Parts MRQ Description Material No.

JXCx-OMU0026

JXC-OMU0026 Controller (11) Step No.2 is turned ON. (OUT0 is turned OFF, and OUT1 is turned ON.) Note) Signal name (12) INP is turned OFF. DRIVE (2)(6)(10)(14)(18)(22)(26)(30) (13) BUSY is turned ON. (1)(9)(17)(25) IN0 (14) DRIVE is turned OFF. (9)(17)(25) IN1 (15) INP is turned ON. (25) IN2 (16) BUSY is turned OFF.

Compact Cylinder Series CQS

6 7 21.5 25 27 8 4.5 2.5 16 20 25 0 3.5 5.5 0 3.5 5.5 19 22.5 24.5 2 6 7 6 10 11 4 7.5 9.5 6 2.5 0.5 6 10 11 4 7.5 9.5 6 10 11 4 7.5 9.5 2 [4.5] 1.5 [1] 3.5 [1] Long Stroke 5 5.5 9 10 19.5 21.5 25 27 1 1.5 4 6 12 16 20 25 7 6 12 14 5 [-2.5] 5 5.5 9 10 7 6 12 14 17 19 22.5 24.5 9 9.5 13 14 11 10.5 16 18 1 0.5 6 8 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 11 10.5 16 18 4.5 [2] 10 [7.5] 12 [9.5]

CNG

For details, refer to page 9-15-65. With pre-wire connector is available for D-G5NTL, G5NBL type, too. For details, refer to page 9-15-66. 9-5-22

VFS

Note 2) Exhaust cleaner AMC610-10 is not attached.