Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

Hg, Valve: 20 - 115 psi (Pressure Only), Operating Speed: 64 MSEC @ 90 psi Valve Input, Porting: Valve = 5/32 OD Tube Push In, Flow Rate: Cv: .06 Orifice: = 0.080 2.5 CFM @ 100 psi , Cv: .06, Orifice: = 0.080, 2.5 CFM @ 100 psi, Supply Consumption: Approx. 275 cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve

IDX-OM-W017

IDFA6E 455 275 Rc3/4 15 485 568 355 300 270 31 42 80 230 32 15 240 80 IDFA8E IDFA11E IDFA15E1 Rc1 300 603 578 41 54 396 87 258 43 15 270 101 380 314 16 IDFA Series 6-3 6 3 IDX-OM-W017 6 6-4 IDFA3E / 4E / 6E / 8E IDFA11E C R GFGI R C R GFGI R L N PE L N PE TB TB ILS ILS V V V V EVD EVD PTC OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1

IDX-OM-W053

275 15 6 2 6 6 3 (50/60Hz) AC200/200,220V GFCI R R L N PE TB ILS V V EDV OLR PTC PE CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa

IDX-OM-W019

BLOCK DRAIN TUBE (O.D.10 LENGTH:0.8m) (820) J K L P N M H 4-13 POWER CABLE WITH PLUG (L=2800) Dimensions (inch [mm]) Model Thread Size A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6 2.6 4.9 12.0 1.3 2.9 1.2 1.4 6.1 0.8 13.0 9.1 0.6 [226] [410] [473] [67] [125] [304] [33] [73] [31] [36] [154] [21] [330] [231] [15] 17.8 0.5 IDFB4E 1/2 [453] 17.8 [13] 1 1.1 10.8 [453] 1.2 [283] 3.1 [275

IDX-OM-W020

IDFB6E [455] 0.6 [270] [31] [42] [80] [230] [32] [15] [240] [80] [275] 3/4 [15] IDFB8E 19.1 22.4 14.0 11.8 [300] IDFB11E [485] [568] [355] IDFB15E 1 11.8 23.7 22.8 1.6 2.1 16.6 3.4 10.2 1.7 0.6 10.6 4.0 15 12.4 0.6 [300] [603] [578] [41] [54] [396] [87] [258] [43] [15] [270] [101] [380] [314] [16] 6-3 6 4 IDFB Series IDX-OM-W020 6 6-4 IDFB3E 1 2 CM P FM1,2 1 2 PE OLR TB PTC

PSxx-OMF0005CN

IP66 IP40 060 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 NNPT1/8 FG1/8 2)5m () M12 4 4 (0.64 mm () (21) ()253 g()250 g 205 g278 g+4 g 1 2LED -26No.PS-OMF0005CN-E EXH 1 1 2 3 4 5 6 L1 46 84 122 160 198 236 L2 38 76 114 152 L3 38 76 114 152 190 DIN EXH DIN 1 2 3 4 5 6 L1 46 84 122 160 198 236 1 L2 38 76 114 152 L3 38 76 114 152 190 L4 62.5 120 162.5 200 237.5 275

Modular F.R.L. Unit

With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B 107 160 214 251 255 B B AC10A AC20A AC30A AC40A 208 246 249 234 272 275 209 247 250 AC40A-06 6 F.R.L.

Cylinder with Lock Series CNS

V FT VA AL A K F BN N N RT M C B FX FZ H S + Stroke ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BF BN BP BQ C D E EA F FA FD FT FX FY FZ G GA 125 140 160 to 1400 50 47 145 145 205 1/2 3/8 115 36 90 63 35 14 19 14 190 100 230 16 155 to 1400 50 47 161 160 245 1/2 3/8 128 36 90 63 35 14 19 20 212 112 255 16 180 to 1400 56 53 182 180 290 1/2 3/8 144 40 90 63 43 14 19 20 236 118 275

Modular Type Filter Regulator Series AW

2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting B With drain guide B Metal bowl B 107 160 214 251 255 Metal bowl with level gauge Model B AW10 AW20 AW30 AW40 AW40-06 234 272 275

MXS Series Air Slide Table

6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 169 223 275