Table of Contents

L L L S S S L L L 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 20.5 Pressure gauge SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 5.25 DIN rail center L3 11.2 L4 24 L5 OUT 3 OUT 2 OUT 4 Left Right OUT 1 OUT 5 Stations 1 n Stations L1 L2 L3 L4 L5 1 106 120 135.5 2 144 38 162.5 173 3 182 38 76 200 210.5 4 220 76 114 237.5 248 5 258 114 152 275

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

80 72.5 54.5 M plug connector (M) 56 61 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Indicator light 89 77 78 R 3 1 P : AC Equation L1=16n+11 L2=16n+22 n: Station (Max. 20) Dimensions L n 2 43 54 75 85.5 20 331 342 362.5 373 15 251 262 287.5 298 16 267 278 300 310.5 17 283 294 325 335.5 18 299 310 337.5 348 19 315 326 350 360.5 12 203 214 237.5 248 13 219 230 250 260.5 14 235 246 275

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

1 : AC 93.5 86 M plug connector (M) R P 69.5(74.5) 300 (Lead wire) 86(87) 3 1 82.5(83.5) 98.5 Indicator light Cover dia 1.5 Cross section 0.23mm2 : AC Dimensions n: Stations (Max.20) Equation L1=20n+8 L2=20n+26 L n 2 48 66 87.5 98 18 368 386 412.5 423 19 388 406 437.5 448 20 408 426 450 460.5 15 308 326 350 360.5 16 328 346 375 385.5 17 348 366 387.5 398 10 208 226 250 260.5 11 228 246 275

MGP

st 200 75st or less Over 75st to 175st Over175st to 275 st Over 275st Over 275st 75st or less 45 11 7.5 Rc 1/8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88

MXS

MXS20L-10 MXS20L-20 MXS20L-30 MXS20L-40 MXS20L-50 MXS20L-75 MXS20L-100 MXS20L-125 MXS20L-150 169 223 275 3.11-33 Series MXS Dimensions MXS 25L/Symmetric style ZZ Z Basic style 62 0.5 55 15 M 4.5 (With stroke adjuster at retraction end) 2-M8 X 1.25 thread 15 deep 6H9 6 deep +0.030 0 N -1 X F 2 30 6H9 6 deep +0.030 0 6-M6 X 1 thread 10 deep 31 F (With stroke adjuster at extension end) FF 38

IIIIIIIIII

Valve=5/32 OD Tube Push In FLOW RATE Cv=.06 Orifice=0.080 2.5 CFM @ 100psi SUPPLY CONSUMPTION Approx. 275 cc/min @30psi Valve Input 700 cc/min @ 100psi MATERIALS Pilot= Body..Polysulfone Diaphragm..Polyurethane Spring..Stainless Others..Nylon, Acetal Valve= Housing..Nylon Plunger..Aluminum Seals..Buna N Others..Brass OP.

Air Catch Sensor Series ISA

L L L S S S L L L 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 20.5 Pressure gauge SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 5.25 DIN rail center L3 11.2 L4 24 L5 OUT 3 OUT 2 OUT 4 Left Right OUT 1 OUT 5 Stations 1 n Stations L1 L2 L3 L4 L5 1 106 120 135.5 2 144 38 162.5 173 3 182 38 76 200 210.5 4 220 76 114 237.5 248 5 258 114 152 275

Refrigerated Thermo-chiller

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

Compact Manifold Regulator Series ARM5

70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 VEF VEP Manifold stations Dimensions by the Number of Stations 10 Model Symbol VER 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VEA ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 VY2 L1 592 537 482 427 372 317 262 207 152 ARM3000 L2 578 523 468 413 358 303 248 193 138 VBA VBAT L3 550 495 440 385 330 275

Modular/F.R.L. Units Series AC

38.5 49 42.5 76 Optional specifications Semi-standard specifications Bracket mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M Q1 Q2 R1 R2 S U V B B B B B AC20D AC30D AC40D AC40D-06 30 24 33 12 5.5 5.5 3.2 29 177 164 160 41 35 7 14 4 41 242 7 209 208 214 234 50 40 9 18 4 48 278 247 246 9 252 272 50 40 9 18 4.6 48 282 251 249 255 275

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N

cc/min @ 30 psi Valve Input Approx. 700 cc/min @ 100 psi , Approx. 275 cc/min @ 30 psi Valve Input, Approx. 700 cc/min @ 100 psi, Materials: Pilot Body: Polysulfone Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N