Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: A (Rubber Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical

Specification: 22 (Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type), Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: A (Rubber Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire: L (3m)

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire: 3m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire: -, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire: 3m, Number: -

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 12mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 10mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Table of Contents

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

2

-10A 10 15.9 26.7 37.9 35.7 15.6 52 AS32l1FG-G02-12A 12 18.5 29.7 40.9 34.5 17 53 AS32l1FG-G03-06A 6 10.4 21.8 33 36.4 1/4 21 16.6 50 48.4 43.5 41.9 AS 13.3 37 AS32l1FG-G03-08A 8 13.2 22.7 33.9 14.2 38 AS32l1FG-G03-10A 10 15.9 26.7 37.9 28 15.6 39 AS32l1FG-G03-12A 12 18.5 29.7 40.9 26.8 17 41 AS42l1FG-G04-10A 10 10.4 21.8 33 28.7 AS-FS 3/8 21 16.6 42.3 40.7 34.8 33.2 15.6 69 AS42l1FG-G04-

Table of Contents

Body type Plug-in type VVFS5000-10A Non plug-in type Part no.

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

SQ1000/2000

B 10A (+) () 10B (+) () () COM (+) Note) Positive COM spec. Negative COM spec.

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

VFS

Body type Plug-in type VVFS3000-10A Non plug-in type Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations 3 m Manual override 10 Clean series VVQ1000-10A-1 VVQ1000-10A-1 VQ1200-5 VQ1200-51 Seal 0 1 Nil: Non-locking push type (Tool required) B: Locking type (Tool required) VQ1200-5 VQ1200-51 Copper/Fluorine/Silicone free + Low particle generation VQ1200-5 VQ1200-51 VQ1200-5 VQ1200-51 21 VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51 Metal seal Rubber seal VQ1100-5 VQ1100-51 VQ1100-5 VQ1100-51

0.4

(Station 9) VV5Q11-09C6FU2 VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 Function Symbol Specifications DC AC Note) For CE-compliant models, DC-type only.

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

V100

-5 (For VQZ100) VVQZ200-10A-2 (For VQZ200) VVQZ300-10A-2 (For VQZ300) It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve, etc.