Step Motor Controller

USB cable Contents q Controller setting software (CD-ROM) PC e Conversion unit w Communication cable (Cable between the controller and the conversion unit) e Conversion unit r USB cable (Cable between the PC and the conversion unit) Hardware Requirements PC/AT compatible machine installed with Windows XP and equipped with USB1.1 or USB2.0 ports.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Hydraulic

Stainless steel With switch only 9 Magnet plate 10 Scraper 11 Rod seal NBR 12 Piston seal 13 Tube gasket 14 Piston gasket 6 Series CHKDB Dimensions 2-Rc P F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke

VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

VQ7-6/7-8

o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

LEC-OM07605CN

PA20]Tough Drive(_ 0 _ _) 200 30 [ms] 200 PF31 FRIC 0 0 0 [r/min] [Pr. PF31] 0 r/min 5 44 5. 5.2.7 4 ([Pr.

MLGP

Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5

MLGP

Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: VBA VBAT VBA VBAT 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 AP100 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 1017 VBA Series Construction/Replacement Parts VBA10A VBA11A w q r e w t r e u q t VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q w r y q t e VBA22A, 42A

Guide Cylinder Series MGG

C D 4 x O T Q 2 x P (Rc, NPT, G) S W K L E B U AA A R AP I X AB Y + Stroke J V Z + Stroke MGJ AC AD 8 x AF MGP MGQ AE MGG MGC 100 piston rod end connection MGF MGZ MGT (mm) Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AC AD AE AF AP B C D E F G H I J K L M N 75, 100 125, 150 200, 250 300 200 25 25 15 170 50 60 228 30 140 200 13.5 65 117 135 180 66 100 M12 x 1.75 depth 24 M16 x 2 depth

Compact

1 1 2N q w e r t y u i o !

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

CL

only No. q w e r t y u i o !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.