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(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

R) port] 30 L-type plug connector (L) (Station 1) (Station n) (Indicator light) Individual EXH spacer (VF5000-75-1A) + + + + + R R P 105 R R R R R 215 Approx. 300 82 196 46 35 1/4 EXH port 2.5 98 82.3 L n L: Dimensions (Lead wire n: Stations length) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1 L2 163 128 196 161 229 194 262 227 295 260 328 293 361 326 394 359 427 392 460 425 493 458 526 491 559 524

Rotary Angle Theoretical Output Unit: N During unclamping (Extension end) 80 to 100 (9010) L type During unclamping (Extension end) Operating pressure (MPa) Rod size (mm) Operating direction Bore size (mm) Piston area (cm2) 80 to 100 (9010) R type 1.0 0.7 0.5 0.3 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Clamp part 600 418 300 182 R

Vertical Mounting, Ball Bushing Bearing r Over 40 mm stroke e 35 mm stroke or less 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] * The limit of vertical load mass varies depending on lead and speed.

. 0: 0.1 1: 1 2: 10 3: 100 UAC (Accumulated minimum unit for connection product [USEr]) Y U8 0x01 12 R/W (1) Set the accumulated volume per pulse when the user's additional range is selected. 0: 0.1 1: 1 2: 10 3: 100 UPLS (Accumulated volume per pulse for connection product [USEr]) Y U8 0x02 13 R/W (2) 0: L 1: oC 2: Ft 3: GAL 4: F 5: oFF 14 R/W Unit setting (USEr is selected) Y U8 0x00 (0

24VDC/650mA 16 VOLTAGE INPUT US C TYPE1 IP CODE IP65 R C US R R R R R R R US C US C US C US C US C US C US C SERIAL NO.

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

-4-C10(-S) SUP block plate SSQ1000-B-R Blanking plug KQ2P-04/06/08/10 Dual flow fitting SSQ2000-52AP. 101 P. 98 P. 100 P. 102 C10 N11 P R D side U side Port plug VVQZ2000-CP Silencer (for EXH port) Individual SUP spacer SSQ2000-P-4EXH block plate SSQ2000-B-R P. 102 P. 98 P. 100 P. 101 C8 L8 P R D side SMC AN200 U side Individual EXH spacer SSQ2000-R-4Special wiring specification (-K) Back

0 @9 q t r y e i u o !3 #0 #1 !7 @5 @4 @3 @6 @1 @8 !8 !5 #2 !6 20 to 63 80, 100 Manual release (Non-lock type) @0 @2 @8 !9 Head end lock Front mounting flange style 20 to 63 80, 100 @7 y w MGJ MGP 80, 100 40, 100 MGQ Since the guide unit figure is the same as the standard type, refer to pages 369 to 371.

Stainless 1/8 3/32 2.4 steel 1/8 3.2 B Grommet 100 VAC With surge voltage suppressor C 110 VAC B C D E F 3/32 2.4 1/8 1/8 3.2 D 200 VAC 3/32 2.4 E 230 VAC 1/8 3.2 1/4 F 24 VDC C37 5/32 4 G DIN terminal 24 VDC G 7/32 5.6 With surge voltage suppressor J 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 4 3/8 J 110 VAC Single 7/32 5.6 2 Size 2 Unit K 200 VAC 3/32 2.4 N.C. 1/8 L 230 VAC 1/8 3.2 3/32 2.4

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at handle locked) DIN rail part no.

Width across flats 13 Width across flats 16 Width across flats 19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 100 20 30 10 10 75 50 10 20 20 40 40 75 75 30 30 50 50 100 100 40 Model CXS20-R CXS25-R CXS32-R 22 27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162

320 63 325 100 14.5 71 16 6.5 120 343.5 75 353.5 Double Acting, Double Rod Flange Rod side: CP96NF-W 4 x FB R E2 MF W TF UF Head side: CP96NG-W MF ZF + Stroke [mm] Bore size E2 FB MF R TF UF W ZF 32 50 7 10 32 64 79 16 188 40 55 9 10 36 72 90 20 211 50 70 9 12 45 90 110 25 230 63 80 9 12 50 100 120 25 249.5 80 100 12 16 63 126 153 30 300 100 120 14 16 75 150 178 35 328.5 18 CP96N/C96N Series

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Note Mounting screw (M3 x 6) For valve unit (R port), Noise reduction: 21 dB or more, Effective area 5 mm2 Model Description Note) At rated voltage With foot bracket DXT170-34-1A Operating Pressure AN120-M5 (8 x 17l) Silencer M5 Note) Vacuum specifications (MPa) 1 (P) port R port 27 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0.4 Operating pressure range (MPa) 0 to 0.7 Type of actuation

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz (Ex.)