3 Port Solenoid Valve Rubber Seal Series SY100

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Refrigerated Air Dryers

Wall *1 For air-cooled type, leave a space of at least 600 mm between the heat exhausting surface and the wall. For water-cooled type, leave a space at least 600 mm between the facility water piping side and the wall. Leave at least 600 mm on the sides indicated with .

Guide Cylinder Series MGG

, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R and U are for DC only.

MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

125

y u y r t Port 23(P2) (Pilot air port) Port 12(P1) (Pilot air port) e t w t Port 3(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

New

Rated voltage Rated voltage Electrical option Electrical option GDM2A-G-S2 24 VDC 24 VDC 12 VDC 100 VAC 100 VAC 110 VAC 110 VAC 200 VAC 200 VAC 220 VAC None C18312G6GCU GDM2A-R None 220 VAC 230 VAC 230 VAC 240 VAC 240 VAC 24 VAC 24 VAC 48 VAC GDM2A-G-Z5 GDM2A-R-L1 GDM2A-R-L1 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L2 GDM2A-R-L5 GDM2A-R-L5 48 VAC 24 VDC

VZS

Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no. Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves.

3 Port Solenoid Valve

1 i r P A R For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Nil 6 10 15 20 25 30 50 Without lead wire: (with connector and 2 sockets) 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm 2 Series V100 How to Order Standard type Base mounted V1 4 M 1 5 3 port Port size Nil: Without sub-plate M5

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

5 Port Solenoid Valve

S Z NS NZ r Pilot type Nil R Internal pilot External pilot Only Nil is available for M5. !

15

Contents 6 CYS06-37 -AJ024-R CYS06-37AAJ024-R 10 CYS10-37 -AJ025-R CYS10-37AAJ025-R 15 Set of the nos. 25, 26, 33 Set of the nos. 34, 41 Set of the nos. 37 BMY3-016 20 CYS20-37 -AJ027-R CYS20-37AAJ027-R 25 DCYS25-37 -AJ028-R 32 CYS32-37 -AJ029-R CYS32-37AAJ029-R 40 -X Note 3) A switch spacer, as specified in the table above will be required if an auto switch is mounted afterward.

HRX-OM-W058

. 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS018-A-20--R . 9-7 9.4.2 HRS030-A-20--R . 9-7 9.5 Heating capacity . 9-8 9.5.1 HRS018-A-20-R, HRS030-A-20-R . 9-8 9.6 Pump capacity. 9-9 9.6.1 HRS018-A-20-R, HRS030-A-20-R . 9-9 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R . 9-9 9.7 Compliance . 9-10 9.8 Sample DoC. . 9-11 9.9 Daily Check Sheet . 9-12 Chapter 10 Product Warranty . 10-1 HRS-R Series HRX-OM-W058

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

HRX-OM-X027

[] 50Hz 60Hz Fig 9.5-1 Heating capacity(HRS050-A-20-R) HRS-R Series 9.4 Cooling capacity 9-7 HRX-OM-X027 Chapter 9 Documents 9.6 Pump capacity Fig 9.6-1 Pump capacity(HRS050--20-R) 9.6 Pump capacity HRS-R Series 9-8 HRX-OM-X027 Chapter 9 Documents 9.7 Compliance This system conforms to the following standards.

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C