smcmaintenancepartslist

Contents Bore size (mm) R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR V: FKM R: NBR R: NBR !0 Piston seal 20 25 32 40 50 63 80 100 CQ2B20R-PS CQ2B25R-PS CQ2B32R-PS CQ2B40R-PS CQ2B50R-PS CQ2B63R-PS CQ2B80R-PS CQ2B100R-PS CQ2B20V-PS CQ2B25V-PS CQ2B32V-PS CQ2B40V-PS CQ2B50V-PS CQ2B63V-PS CQ2B80V-PS CQ2B100V-PS !1 Rod seal Set of left nos. !0, !1, !2. !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1 V7 LEFS 32 200 R H B B 3 M2 S q Accuracy w Size e Motor mounting position r Motor type Nil Basic type H High precision type 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol Type Output [W] Size Compatible driver V6 AC servo motor (Absolute encoder) 100 25 LECYM2-V5/LECYU2-V5 V7 200 32 LECYM2-V7/LECYU2-V7 V8 400 40 LECYM2-V8/LECYU2-V8 t Lead [mm] y Stroke [mm] u Motor

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. speed = 200 mm/s or less !

Table of Contents

How to Order ZFA 100 01 Bracket Air suction filter Nil L None With bracket (1 pc. on the left) R With bracket (1 pc. on the right) Type (Recommended flow rate) L or R shows the left or right of the filter IN when viewed from front. 50 l /min (ANR) 200 l /min (ANR) 100 200 Port size ZFA100 B (ZFA200) B (ZFA100) 1 8 1 4 02 01 Thread type Nil T Rc How to Order Manifold NPTF F G Indicate both

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

V

F S TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

F R L T B 1 R Axial entry Right entry 200/230VAC (50/60Hz) 2 Y 0 Without motor Bottom entry Specifications Intermediate strokes 100 5.1 200 5.9 300 6.7 400 7.4 500 8.2 5 to 40 (with no condensation) 10 225 400 mm kg C kg N mm/s mm Standard stroke Strokes other than the standard strokes on the left are available by special order. Consult P/A.

Series SV

IP65 R C US TYPE1 TYPE1 US C R R R R R R R TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C TYPE1 US C MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN MADE IN JAPAN (mm) 8 7 6 5 4 3 2 1 Stations 248 223 210.5 185.5 173 148 123 110.5 Rail length L1 237.5 212.5 200 175 162.5 137.5 112.5 100 Mounting pitch L2 222 202 182 162

SYJ3000/5000/7000

R P R port P Base mounted P port Type 32P Individual EXH spacer assembly R port A, B port R2 R1 -+ -+ R port R P A, B port Mixed mounting of 3 port valves and 4, 5 port valves P port 3 port valve 4, 5 port valve Interface regulator -+ -+ A B R port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 1-5-17.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.

Slide Unit Series CX2/CXWM/CXWL

CXS D-X Individual -X 511 Series CXWL 25 With End Lock: CXWL25Stroke/25 to 200 R 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 Max.

Slide Unit Series CX2/CXWM/CXWL

CXS D-X Individual -X 511 Series CXWL 25 With End Lock: CXWL25Stroke/25 to 200 R 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 Max.

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10 56 62 M14 x 2.0 31 M14 x 2.0 12.5 20 8 Rc3/8 NPT3/8 G3/8 Bore size [mm] PA PB PW Q R S T U VA VB WA WB X YY YL Z 25 st or less Over 25 st 100 st or less Over 100 st 200 st or less Over 200 st 300 st or less Over 300 st 25 st or less Over 25 st 100 st or less Over 100 st 200 st or less Over 200 st 300 st or less Over 300 st 80 14.5 25.5 74 52 174 75 198 156 180 140 28 52 128 200 300 42

SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Basic type / Direct mount type Series CY3B/CY3R

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 SY100-82-2-02 SY100-82-2-03 SY100-82-2-04 Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC (115 VAC) 220 VAC (230 VAC) Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Circuit diagram with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resistor LED: Light emitting diode R: Resistor NL R R LED Fitting and Silencer Part No. for P, R Ports

Table of Contents

1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread after installation.

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/200 ** Non-Standard Product, consult factory for lead time.