5 Port Solenoid Valve Series VQZ1000/2000/3000

VQC VQZ SQ VFS VFR +24 V +24 V VQ7 Power supply for output Power supply for output 0 V 0 V Power supply for the input and for the control unit of the Gateway Power supply for the input and for the control unit of the Gateway +24 V 24 V Caution 1. Take measures to avoid applying repeated bending force or pulling force to the cable.

LG1H

Maximum Speeds for Each Transfer Load Unit (mm/s) Transfer load (kg) 15 20 25 30 1000 1000 930 740 600 500 Model Note LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible

Modular F.R.L. Unit

port valve for V residual pressure AC20B to 40B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] AC20D to 40D AW + AFM + [V] When more than one attachment is required, order in alphabetical order.

Modular F.R.L. Unit

AC20A to 40A AW + AL + [V] 3-port valve for V residual pressure AC20B to 50B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] Accessories AC20D to 40D AW + AFM + [V] Symbol Description Applicable model When more than one attachment is required, order in alphabetical order.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported V V V V V V Symbol Flow adjustment Rear

LEC-OM069xx

Cable Type Allowable Conductor Temperature C Symbol Name IV 600 V grade polyvinyl chloride insulated wire 60 HIV 600 V grade heat-resistant polyvinyl chloride insulated wire 75 The following table shows the wire sizes and allowable currents for three wires.

LEC-OM071xx

Cable Type Allowable Conductor Temperature C Symbol Name IV 600 V grade polyvinyl chloride insulated wire 60 HIV 600 V grade heat-resistant polyvinyl chloride insulated wire 75 The following table shows the wire sizes and allowable currents for three wires.

Magnet: D (Built-in Magnet), Mounting: C (Single Clevis), Bore Size: 50mm, Thread: Rc, Stroke: 75mm

Magnet: D (Built-in Magnet), Mounting: C (Single Clevis), Bore Size: 50mm, Thread: Rc, Stroke: 250mm

Magnet: D (Built-in Magnet), Mounting: C (Single Clevis), Bore Size: 50mm, Thread: Rc, Stroke: 25mm, Rod Boot: J (Nylon Tarpaulin)

Magnet: Built-in Magnet, Mounting: Single Clevis, Bore Size: 50mm, Thread: Rc, Stroke: 75mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Single Clevis, Bore Size: 50mm, Thread: Rc, Stroke: 250mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Single Clevis, Bore Size: 50mm, Thread: Rc, Stroke: 25mm, Rod Boot: Nylon Tarpaulin, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

10

Solenoid coil type Insulation type: Class B, Class H Rated voltage 100 V/200 V/110 V/230 VAC (220 V/240 V/48 V/24 VAC) 24 VDC (12 VDC) Normally Closed (N.C.) Normally Open (N.O.) Size Size 1 Size 2 Size 3 2 mm 3 mm 4 mm 5 mm 7 mm 8 mm 10 mm 1/8, 1/4 6, 8 Voltage in ( ) indicates special voltage.

ZR

Individual spacer ZR1-R1-2 V PV X X Vacuum port Rc 1/8 V port PD + + + + + + X X V X PV 70.5 SMC 16.5 X PD 12 V V (Pitch) 33 35.5 (Pitch) 33 35.5 EXH PD PV PS 13-3-31 31 Vacuum pad connection V port Series ZR Vacuum pad connection V port Ejector System Manifold Nozzle Dia./1.8, 2.0 mm Common exhaust EXH port Common ejector air supply PV port Common pilot valve air supply PS port Common vacuum

0.4

1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

Cylinder with Lock Series CLS

A54 A59W 3-wire (NPN equiv.) 5 V 12 V 5 V, 12 V 100 V Yes IC circuit Relay, PLC 100 V or less No 100 V, 200 V 2-wire 24 V PLC Terminal conduit 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indicator) Solid state auto switches marked with are produced upon receipt of order.

Cylinder with Lock Series CNS

5 V, 12 V IC circuit A96 5 V Yes A93 A90 A54 A59W A33 A34 A44 12 V 100 V Relay, PLC No IC circuit 5 V, 12 V 100 V or less 100 V, 200 V PLC Terminal conduit 2-wire 24 V 12 V Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

HEC_001W-E

P V < 2 3 . 0 C # 2 S V 2 5 . 0 C M O D E 2. Target temperature (no indication on display) Setting range : 10.0 to 60.0 C Min. increment : 0.1 C Indicated content : [SV] : Target temp.(Ex. : 25.0 C) Function : Sets target temperature P V 2 3 . 0 C # 1 S V < 2 5 . 0 C M O D E 3.