Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Vacuum Unit

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.

EX510

0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

M5 x 0.8 Rc 1/4 Rc 1/8 Rc 1/4 Piping Built-in One-touch fittings 6/4 6/4 8/6 8/6 CUJ Rod end male thread JIS Symbol Non-rotating rod With boss in head side CU Note) In the case of without auto switch, M5 x 0.8 is used for 5 stroke only.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

MY1

@7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

New

suppressor) P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 27 29.5 29.5 29.5 32 32 32 44 54 52.5 53.5 58 56.5 57.5 30 32.5 32.5 32.5 35 35 35 30.5 40

Basic type / Direct mount type Series CY3B/CY3R

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

New

2 3 VXFA2 A<1 2 3 t r r w w e e q q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

15

M4 x 12 2.7 9 8 NW M4 x 12 2.7 9 12 NV M4 x 0.7 6 63 40 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 9 8 NU M4 x 12 2.7 11 12 NT M3 x 12 1.5 12 18 63 Component Parts Size: 40 Size: 63 Quantity Motor type NY NX 1 Motor plate 1 Quantity Motor type NY NX NW NV NU NT 1 Motor plate 1 1 1 No.

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

Modular F.R.L. Units

1 q r e w t i u y o !0 !

1

1, !6, !7, !8, !9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !7, @0, @1, @2, @3, #1, #5 CQ2 20, 25, 32, 40, 50 #1 is rod side only.

New

1 56 56 70.5 70.5 52 60 68 73 75 75 92 92 30 34.5 39 41 6.5 6.5 6.5 6.5 10.5 10.5 10.5 10.5 31 35 43 45 13.5 Electrical entry Conduit terminal Conduit Faston Port size P Model Q R Q R Q R S T 71 71 73.5 73.5 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 50 50 52.5 52.5 57.5 (64) 62.5 (68.5) 70.5 (77) 73.5 (79) 25.5 25.5 28 28 63.5 (70) 68.5 (74.5) 76.5 (82.5) 79.5 (85) 100 (106.5

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

NCQ8

4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

1 !3 q u !0 !2 r y e !5 o !