ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

MY1

6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Basic type / Direct mount type Series CY3B/CY3R

6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 No. Description Material Note Component Parts No.

New

For Air/ D Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E

Rotary Actuator

2 i u w !4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

New

3 VXFA2 A<2 3 t r r w w e e q q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

15

(Recommended height 6 mm) Motor Mounting Dimensions [mm] Dimensions [mm] Model n C D E LEJS40N-200 6 1 200 80 LEJS40N-300 6 1 200 180 LEJS40N-400 8 2 400 80 LEJS40N-500 8 2 400 180 LEJS40N-600 10 3 600 80 LEJS40N-700 10 3 600 180 LEJS40N-800 12 4 800 80 LEJS40N-900 12 4 800 180 LEJS40N-1000 14 5 1000 80 LEJS40N-1200 16 6 1200 80 Motor type n FA FB FD NZ/Mounting type Z 2 M4 x 0.7 7 46 NY/

VS7-6

Model Effective area (With sub-plate) (mm 2) (Nl/min) Response time (2) (sec) Weight (3) (kg) 0.025 or less 0.015 or less 0.045 or less 0.045 or less 0.05 or less Max. operating rate (1) No. of positions Model 1 4 (cycle/sec.) 20 20 10 10 10 VS7-6-FG-S--Q VS7-6-FG-D--Q VS7-6-FHG-D--Q VS7-6-FJG-D--Q VS7-6-FPG-D--Q 2 (Single) 2 (Double) 3 (Closed centre) 3 (Exhaust centre) 3 (Pilot check) 27

1

Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions. 6-17-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6-17-2 3 Made to Order Simple Specials: Simple Specials P. 6-17-3 CJ1 Page z -XA0 to A30 Change of rod end shape 6-17-4 x -XA1

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

New

Cable 6 to 12 G1/2 Q F S D F Q 280 G1/2 D 45 (42) (44) 31.5 With full-wave rectifier R C E C R E J J OUT IN IN OUT 2 x M Depth 5 2 x M Depth 5 G A H A G H 2 x P Port size B1 B B B1 2 x P Port size Bracket mounting hole dimensions (mm) A B B1 C D E F G Port size P a1 (VXZ23, 25) Note) a a1 (VXZ24, 26) Note) H J M Model 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 w t !1 !3 q u !0 !2 r y e !5 o !

NCQ8

3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2

Modular F.R.L. Units

Example) AL30-03B-R-A q w e r t q Symbol Description Body size 20 30 40 Nil N F Rc NPT G w Thread type + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 e Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket r + Nil C Bowl Polycarbonate bowl With bowl guard a Note 2) Note 2) + Without drain cock With drain cock Drain cock with barb fitting (for 6 x 4 nylon tube) b Nil 3

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Air Cylinder

+ 35(n 2) 2 (n = 2, 4, 6)3 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting D-H7/H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6)3 60 + 22.5 (n 2) (n = 2, 3, 4, 5) CM3 CG1 D-C7 D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6)3 50 + 20 (n 2) (n = 2, 3, 4, 5) CG3 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6)3 50 + 27.5 (n 2) (n = 2, 3, 4, 5) JMB D-M9V 5 5 10 + 10 (n

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Electric Grippers

6 !8 !0 i !5 Step Motor (Servo/24 VDC) y !1 !2 !4 q u w e r t !7 Component Parts No.