Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: S (Centralized Lead Wire, Lead Wire Only), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge;

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: B (PNP, 2 Outputs), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)

Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)

Distance Range: G (0.02 to 0.15mm), Piping Specifications: C (Supply Side: Rc 1/8, Detection Side: ø6 One-touch Fitting or ø4 One-touch Fitting in case of Rated Distance Range 0.01 to 0.03 mm), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 3, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R3

Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3 [CHEMRAZ® (SSE38)], Seal Replacement: A (Valve Seal, Exterior Seal; In Addition for XLD: S Valve Seat Assembly

Indicator, Rear Flange Surface), Temperature: H0 (5 to 150°C, No Heater), Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3 [CHEMRAZ® (SSE38)], Seal Replacement

Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: U (w/Light & Surge Voltage Suppressor, Non-polar Type), Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5 C10: One-touch fittings for 10 60.5 2-4.5 Mounting holes 02: Rc(PT)1/4 41.8 22 2-3.4 Mounting holes 28.5 20 A 4 13 18 SMC 38 Cover dia 1.6 Cross section 0.34mm2 2 46.5 R3

%silltr

.| r3"hin is then ffififW = 40 cents / hr. In our example: 0.336 m3ry'min 1mg/min . 40 cents / hr = 13.4 cents per hour.

Direct Solenoid

{/s6ews tF2 = SPR0102 Ooubl Inlerlace Feg. w/icfsws +R3 = SPF0101 SinSle hlerlac Reg. w/98u9 0-60 PSI tR4 = SPRo101 Sinsl Interlace Feg. Vqauge G160 PSI T = Top wie oudel 1 sjngr sol-/+ring rturn I 2 oouble sol,/datntsd t 3Oouble Sol,/sprhg cenlded t (alr Fds blockd in ndbau 4. Doublo Sol./sPdng c6ntsrd t (cy'por6 opn io exhausi in n6uttaD.

Air Pilot Operated

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NVZseies

N\rz3o4FoH 0.18(4.5)Dia L typ plug conneclorz/NVZ304-OL.Nvz384R-OL M type piug connector.,/Nvz3o4-OM Nvz3O4R-Oil Type 20 Manifold,z Top Ported inch (mm) Grommet(G),(H) L type plug connector (L) M type plug connector TApe 21R Manifold,/ Top Ported(External Pilot) inch(nn) Grommet (G), (H) L type dug connector(L) H type plug connector ( ) o = 6 o J 13.78 (350) r3.

Title not found

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

KQ2-G

connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3

VCHN

How to Order VCHN 06 3 Option Port size Nil None Symbol VCHN4 VCHN3 Port size F With freeze reduction 06 10 12 14 R3/4 Symbol R1 Body size R11/4 3 4 R11/2 608

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3

R3/8XR1/4 ZINC CHROMATE NIPPLE