5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

(A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ Note 2) 8 2 1 (P) 3 (R2) 1 (P) 3 (R2) 5 (R1) 5 (R1) 5 (R1) 1 (P) 3 (R2) VQ4 Metal seal Rubber seal 3 position closed center 3 port for mixture mounting (N.O.) (A) 4 (B) 2 (A) 4 (B) 2 Note) For inch size one-touch fittings and optional thread type, refer to page 933.

IDX-OM-M051

/2 R1/2 36 129 20 7122 350 700 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 4 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

14~18) 1418) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y1/2 () R1/2 R1/2 36 129 20 7122 350 700 752 1,3 -W5 (-W5) -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 4 IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056 A 720 9351 1290 160 150 150 160 t K K K K K16K JIS

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

AS121F-U10/32-03T 31 5/32" 9.3 M50.8 8 9.6 4.5 0.7 27.4 4 9.3 10 0.7 27.4 10-32UNF 8 9.6 4.5 10 31 AS121F-M5-06T AS121F-U10/32-05T 11.7 16.5 3/16" 11.4 21.3 26.1 18.1 22.9 13.5 6 11.6 11.7 AS221F-01-23ST AS121F-U10/32-07T 13.5 12 18.3 23.1 1/4" 3.2 8.4 20 12.7 20 AS221F-01-04ST AS221F-N01-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1

15

R1 With shock absorber With bumper bolt Dimensions (mm) Model A B C d G GA HB HC HG HP JJ K NA NB NC D E GB HT L F GP H HA LD M MM CY1S6-Z 6 7.6 25 5 20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 8 (DIN Rail Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: H (High Precision Type), Body Size: 30, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LER, Table Accuracy: H (High Precision Type), Body Size: 30, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Driver Type: AP (Pulse Input Type, PNP), I/O Cable Length, m: None, Driver Mounting: Screw Mounting, Table Accuracy: H (High Precision), Size: 30, Max Rotating Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Option: Screw Mounting, Actuator Series: LER (Rotary Table), Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Option: Screw Mounting, Actuator Series: LER (Rotary Table), Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: w/o Cable, Option: Screw Mounting, Actuator Series: LER (Rotary Table), Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 2 (External Stopper: 180°)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 3 (External Stopper: 90°)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: 1P (LECP1, Programless Type, PNP), I/O Cable Length for

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: R (Robotic Type Cables, Flexible Type), Actuator Cable Length: 3 (3), Controller Type - LEC, JXC: 1P (LECP1, Programless Type, PNP), I/O Cable Length for

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5), Controller Type - LEC, JXC: AP (LECPA, Pulse Input Type, PNP), I/O Cable Length for LEC: 5 (5)

Table Accuracy: H (High Precision), Size: 30, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 2 (External Stopper: 180°), Motor Cable Entry: L (Entry on the Left Side)