VBA-OM-S009

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring

VBA-OM-S001

Spare port IN port Remove Rc1/2 Rc1/2 (3) Change of the booster regulator OUT port plug : Remove the hexagon socket head plug at the joint of the tank at the back side of the booster regulator. (Remove any sealing agent left on the thread.) : Mount the hexagon socket head plug to the OUT port on the front of the booster regulator by applying the seal tape.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

/8 19 45.8 44.9 18.2 24.3 40.6 35.6 19 R1/2 24 54.7 49.7 22.3 28.5 47.4 42.4 24.6 36.1 50.4 Note 1) Reference dimensions Note 2) Reference dimensions of thread M5, R after installation.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to direct sunlight. 2.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Refer to back page 50 for Safety Instructions and pages 543 to 546 for Flow Control Equipment Precautions. 603 AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D.

FGG-E

Specifications Table 2.

VBA-OM-S008

Accessory set VBAT10S-Y-4 Table 2 Accessories VBAT-U VBAT-U Operate the air tank fixed. (2) Operating pressure (1) Applicable standard VBAT05S1-U-X104 VBAT10S1-U-X104 (1) Accessories (4) Safety valve (3) Connection (5) Drain valve (2) Installation (3) Piping Thank you for choosing this SMC product.

VBA-OM-P019

4 1/4 VBA2/VBA4 TSG R0003-2007 2 () IN :VBA2 8VBA4 8 10 (I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22~24Nm(R3/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873

VBA-OM-S007

oC 1/4 IN 1/2 1 SMC VBAT-V1 1 305 236 355 250 A B C D E F G H I J K L M 444 394 Rc3/8 59 494 444 Rc3/8 59 85 85 IN Rc1/2 Rc1/2 Rc3/4 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer Rc1/2 Rc1/2 180 200 100 400 205 250 150 500 Rc3/4 413 OUT (J) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Rc1/4 477 429.8 527 479.8

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL, XL VALVE, R3 MAT'L, HIGH VACUUM VALVE, L45, 0.68 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, XLA, EXTERNAL SEAL, R3 MAT'L, HIGH VACUUM VALVE, L45, 0.265 lb

VBA-OM-P018

4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F G H I J K L M O VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc3/8 257

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

VBA-OM-S006

IN :VBA1 4VBA2 8 O : VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) VBA1 VBA2 () VBA2 24NmM10 VBA1 3NmM5 6 OUT O O

SMC's series LER electric rotary table is available in a basic or high precision style, and features a low profile, space-saving design.  A digital control allows easy setting of the angular speed, and angular acceleration/deceleration, etc.  Rotation angle is possible up to 320° (310° on LER10).  Up to 6.6 N·m of rotation torque (3.3 N·m of pushing torque available).  The rotation speed

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Note 2) Refer to parts number of Construction on the page 470 for changed part. Number indicates parts number of Construction accordingly. P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)

Available tube connections: 5/32", 1/4", 5/16", 3/8", 1/2", 4mm, 6mm, 8mm, 10mm, 12mm; Available threaded connections: M3 x 0.5, M5 x 0.8, 10-32 UNF, R1/8, R1/4, R3/8, R1/2, NPT1/8, NPT1/4, NPT3/8, NPT1/2; Spatter covers available (ASV310F/410F/510F)