XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
Example of fail-safe circuit Fail-safe circuit (7) (9) FU port FB port FA port (6) Air (8) Manual EB Manual EA cylinder G (3) Shut off valve Shut off valve (1) (2) E-STOP valve Servo valve Servo valve Air supply port (4) R3 port (5) (10) R2 port R1 port P port Air servo cylinder circuit (Main circuit) Components No.
Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL Symbol Nil A B C Mounting position Valve open/closed Valve open Valve closed Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: B (PNP, 2 Outputs), Unit Specification: w/Unit Conversion Function, Stations: 1, Cable Option: L (Right Angle), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)
/8, Rc3/8 04 R1/2, Rc1/2 Thread connection 1: Only for Bulkhead union and Bulkhead male elbow Spare Parts Applicable tubing O.D.
Fitting Type: T (Union Tee), Size Combination: 6A-R3 (A: 1" x 7/8", B: 3/8" x 1/4", C: 1" x 7/8")
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: S (Centralized Lead Wire, Lead Wire Only), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge;
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: N (NPN Output), Unit Specification: M (Fixed SI Unit), Stations: 2, Cable Option: T (Centralized Lead Wired, w/Bracket), Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2
Rated Distance Range: H (0.05 to 0.30mm), Piping Specifications: F (Supply Side: G 1/8, Detection Side: G 1/8), Output Specifications: P (PNP Output), Unit Specification: w/Unit Conversion Function, Stations: 4, Cable Option: Straight, Bracket Option: B (Bracket), Control Unit: R3 (w/Control Unit, Supply Port: Right Side, With regulator, Round type pressure gauge; 0.2 MPa)
Positioning Method: 1 (Ball Coupling), Operation: 1 (Double Acting), Electrical Entry: C (3m Cable), Robot Adapter: R3 (Applicable Shaft Diameter Ø14)
Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable, 1.5m)
Series: LEFB, Size: 32, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: T (48mm), Stroke: 2000mm, Motor Option: w/o Option, Auto Switch Compatibility: C (with Includes 1 Mounting Bracket), Grease Application: With, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type, Length: R3 (3m), Controller: C51 [Parallel Input (NPN)], Mounting: 7 (Screw Mounting), I/O Cable: 1 (I/O
Size: 25, Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 150mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: D (Double Clevis, Top Mounting), Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 7 (Screw Mounting), I/O Cable: 1
Size: 32, Motor Mounting Position: D (In-line), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 400mm, Motor Option: W (w/Lock/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange, Top Mounting & In-line), Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o
Size: 40, Motor Mounting Position: D (In-line), Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 300mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: F (Rod Flange, Top Mounting & In-line), Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable