20 Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1L = 0.035 SCFM 1L = 0.035 SCFM 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 14.5 29.0 43.5 58.0 72.5 87.0 102 116 131 145 psi 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [
How to Order Manifold [Option] VV5Q 08 F 03 U 1 1 5 CE-compliant Series Nil Q CE-compliant 5 VQ5000 Thread type Option Manifold Nil Rc F G N NPT T NPTF Symbol Option Nil None CD1 Exhaust cleaner for Rc 1: D side exhaust CD2 Exhaust cleaner for Rc 1 1/2: D side exhaust CU1 Exhaust cleaner for Rc 1: U side exhaust CU2 Exhaust cleaner for Rc 1 1/2: U side exhaust K Note 3) Special wiring specifications
2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting
Center Trunnion: CLA2T P (Rc, NPT) Rod side cylinder port BQ (Rc, NPT) Locking port for pressurizing (Plug with breathing hole at exhaust locking) BP (Rc, NPT) Unlocking port Locking condition indication plate GA GC GD Unlocked when pressurized GL GR Plug cap with breathing hole (For spring locking) GL LOCK FREE P (Rc, NPT) Head side cylinder port Width across flats KA With rod boot PL PG
3/8 AC20-A Rc 1/4 AC25-A Rc 3/8 0.6 0.6 0.6 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 0 500 1000 1500 0 200 400 600 800 0 500 1000 1500 Flow rate L/min(ANR) Flow rate L/min(ANR) Flow rate L/min(ANR) AC40-A Rc 1/2 AC40-06-A Rc 3/4 0.6 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2
No indication is necessary for Rc thread; however, indicate N for NPT thread, and F for G thread.
, 150, 200 250, 300, 350, 400 MGCM Slide bearing Data 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900, 1000 Intermediate strokes and short strokes other than the above are produced upon receipt of order.
Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.
Fig. 2-1 Product model number (Air-cooled type) HRL Series 2.1 Model Number of Product 2-1 HRX-OM-X037 Chapter 2 Name and Function of Parts W 40 HRL Cooling capacity CH1 CH2 100 10 kw 1 kw 200 21.5 kw 1 kw Cooling method W Water-cooled refrigeration Piping thread type Nil Rc F G (Rc-G thread adapter set is included) N NPT (Rc-NPT thread adapter set is included) Power supply 40 3phase AC380
(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14 26 M8 X 1.25 Rc(PT)1/4 MY1 Without rear plate Bracket mounting stroke Long stroke Bracket mounting stroke stroke range (mm) Bore (mm) Bore (mm) Bore (mm) Y R Z 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100st or more 250 to 400 88 14 119 125st or more 350 to 500 88 14 131 150st or
With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.
Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 0 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 300 KN-R02-250:2.5 KN-R02-200:2 250 KN-R02-150:1.5 KNH-R02-150 200 KN-R02-100:1 150 KNH-R02-100
Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62
Both directions Lock direction MXW MXP Stroke Bearing Standard stroke (mm) Long stroke (mm) Bore size (mm) MG Model MGP 20 75, 100, 125, 150, 200 250, 300, 350, 400 MLGCM Slide bearing 25 350, 400, 450, 500 MGQ 75, 100, 125, 150, 32 350, 400, 450, 500, 600 MLGCL Ball bushing bearing 200, 250, 300 40 350, 400, 450, 500, 600, 700, 800 MGG * Middle strokes and short strokes other than shown
Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30
25 6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16 5 0 183 16 54 8 Series CHN Dimensions Single clevis type: CHNC Width across flats B1 MM GA2 NN Rc P GB2 Rc P Rc P Cushion valve Cushion valve GB1 V T Cushion valve H1 GA1 CD Push press fitting
LAR T LB LBR /2 400 s or more LZ LZR (4) Analog output driver Servo amplifier MO1 (MO2) Output voltage: 10 V Maximum output current: 1 mA Resolution: 10 bits or equivalent LG Note. Output voltage range varies depending on the output contents. 3 27 3.
port size DIN rail mounting (For manifold) D Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 F With bracket Name plate N Note) When two or more symbols are specified, indicate them alphabetically.
Rc 1/8 lock port for pressure lock (Plug with breathing hole for spring lock) Rc 1/8 unlocking port Unlocked when pressurized Rod side cylinder port Manual unlocking cam Lock nut Width across flats B1 Head side cylinder port WH (Max.)
Note 3) When two or more symbols are specified, indicate them alphabetically. 2-5-15 Base Mounted 16 Series VQ4000 T Kit (Terminal block box kit) 38 70 (Pilot EXH port) 2-Rc 1/8 18 18 17.5 PE 30 42 R1 R2 3 5 P 1 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC Rc 1/4: Rc 1/4 thread Rc 3/8: Rc 3/8 thread 1(P), 5(R1), 3(R2) port 6-Rc 1/2 C8: One-touch fitting for 8 C10: One-touch fitting for